Plasma processing apparatus

Patent metadata

Field	Value
Publication number	US-9245776-B2
Application number	US-97987510-A
Country	US
Kind code	B2
Filing date	Dec 28, 2010
Priority date	Dec 28, 2009
Publication date	Jan 26, 2016
Grant date	Jan 26, 2016

Abstract

A plasma processing apparatus includes a processing chamber in which a target substrate is processed; an application electrode and a facing electrode provided to face each other in the processing chamber, a plasma generation space being formed between the application electrode and the facing electrode; and an RF power supply connected to the application electrode, an RF power being supplied from the RF power supply to the application electrode. At least one of the application electrode and the facing electrode includes a base formed of a metal, and a dielectric body inserted into the base, one or more metal plate electrodes being buried in the dielectric body.

First claim

What is claimed is:

1. A plasma processing apparatus comprising:
a processing chamber in which a target substrate is processed;
an application electrode;
a facing electrode positioned to face the application electrode in the processing chamber, a plasma generation space being formed between the application electrode and the facing electrode;
an RF power supply connected to the application electrode, an RF power being supplied from the RF power supply to the application electrode; and
wherein at least one of the application electrode and the facing electrode includes a base formed of a metal, a dielectric body inserted into the base, and a plurality of metal plate electrodes buried in the dielectric body,
wherein each of the metal plate electrodes are arranged on top of one another while being spaced from each other in the dielectric body,
wherein each of the metal plate electrodes have different-sized concentric openings with regard to a central portion of the dielectric body,
wherein a size of the concentric openings decreases in accordance with a distance of a respective metal plate electrode from the plasma generation space such that a concentric opening of a first metal plate electrode from the plurality of metal plate electrodes that is closer to the plasma generation space is larger than an opening of a second metal plate electrode from the plurality of metal plate electrodes located further away from the plasma generation space than the first metal plate electrode, and
wherein electric field intensity distribution of the RF power is controlled by controlling potentials of each of the metal plate electrodes.

2. The apparatus of claim 1 , wherein each of the metal plate electrodes are formed of a same metal.

3. The apparatus of claim 1 , wherein each of the metal plate electrodes have a sheet resistivity of about 2Ω/□ or less.

4. The apparatus of claim 1 , wherein at least a part of a surface of the dielectric body is exposed to the plasma generation space.

5. The apparatus of claim 1 , wherein a surface of the dielectric body facing the plasma generation space is coated with a thermally sprayed layer.

6. The apparatus of claim 1 , further comprising:
a plurality of gas introduction lines,
wherein an upper one of the application electrode and the facing electrode includes the dielectric body in which each of the metal plate electrodes are buried, and the gas introduction lines are extended through the upper electrode.

7. The apparatus of claim 6 , wherein a gas diffusion portion is provided above the dielectric body of the upper electrode, the gas diffusion portion communicating with the gas introduction lines and serving to diffuse a gas.

8. The apparatus of claim 1 , wherein a lower one of the application electrode and the facing electrode includes an electrostatic chuck mechanism in which a metal sheet member is provided, and the dielectric body in which each of the metal plate electrodes are buried, wherein each of the metal plate electrodes are located below the metal sheet member of the electrostatic chuck.

9. The apparatus of claim 1 , wherein the dielectric body has a cylindrical shape.

10. The apparatus of claim 1 , further comprising: a driving mechanism including a driving unit having a ground potential,
wherein the driving mechanism is configured to control a physical or electric connection between the driving unit and each of the metal plate electrodes by moving the driving unit to change a position of the driving unit relative to each of the metal plate electrodes such that the potentials of each of the metal plate electrodes are selectively controlled to the ground potential, and
wherein when the potentials are controlled to the ground potential, a capacitance component at a peripheral portion of the dielectric body becomes larger than that at a central portion of the dielectric body, thereby obtaining a uniform electric field intensity distribution without significantly lowering an electric field intensity at the peripheral portion of the dielectric body.

11. The apparatus of claim 10 , wherein the driving unit includes a ring electrode, and the driving mechanism controls a physical or electric connection between the ring electrode and each of the metal plate electrodes by driving the ring electrode.

12. The apparatus of claim 10 , wherein the driving mechanism controls the physical or electric connection between the driving unit and each of the metal plate electrodes by one of: (a) vertically moving the driving unit without rotating the driving unit, (b) rotationally and vertically moving the driving unit, or (c) rotating the driving unit without vertically moving the driving unit.

13. The apparatus of claim 12 , wherein the driving unit is further configured to vertically move the driving unit without rotating the driving unit to control the physical or electric connection between the driving unit and each of the metal plate electrodes.

14. The apparatus of claim 12 , wherein the driving unit is further configured to rotationally and vertically move the driving unit to control the physical or electric connection between the driving unit and each of the metal plate electrodes.

15. The apparatus of claim 12 , wherein the driving unit is further configured to rotate the driving unit without vertically moving the driving unit to control the physical or electric connection between the driving unit and each of the metal plate electrodes.

16. The apparatus of claim 10 , wherein said at least one of the application electrode and the facing electrode further includes a groove portion opened toward an opposite side of the plasma generation space, and wherein the driving mechanism is further configured to drive the driving unit in the groove portion.

17. An electrode for use in a plasma processing apparatus which generates a plasma of a gas by an RF power supplied to the electrode and performs a plasma process on a target substrate by using the generated plasma, and the electrode serves as one of an application electrode and a facing electrode that face each other and between which a plasma generation space is formed, the electrode comprising:
a base formed of a metal; and
a dielectric body inserted into the base; and
a plurality of metal plate electrodes being buried in the dielectric body, and
wherein each of the metal plate electrodes are arranged on top of one another while being spaced from each other in the dielectric body,
wherein each of the metal plate electrodes respectively have different-sized openings that are concentric with regard to a central portion of the dielectric body,
wherein a size of the concentric openings decreases in accordance with a distance of a respective metal plate electrode from the plasma generation space such that a concentric opening of a first metal plate electrode from the plurality of metal plate electrodes that is closer to the plasma generation space is larger than an opening of a second metal plate electrode from the plurality of metal plate electrodes located further away from the plasma generation space than the first metal plate electrode, and
wherein electric field intensity distribution of the RF power is controlled by controlling potentials of each of the metal plate electrodes.

18. The electrode of claim 17 , wherein each of the metal plate electrodes is configured to make a physical or electric connection with a driving unit having a ground potential by moving the driving unit to change a position of the driving unit relative to each of the metal plate electrodes such that the pot

Assignees

• Himori Shinji
• Hayashi Daisuke
• Shimizu Akitaka
• Tokyo Electron Ltd

Inventors

• Himori Shinji
• Hayashi Daisuke
• Shimizu Akitaka

Classifications

• H10P72/0421 Primary

  for drying etching · CPC title

• H01J37/3255 Primary

  Material · CPC title

• H01L21/67069 Primary

  Electricity · mapped topic

• H01J37/32541

  Shape · CPC title

• H01J37/32091

  the radio frequency energy being capacitively coupled to the plasma · CPC title