Photomask and method for forming the same

Patent metadata

Field	Value
Publication number	US-9244341-B2
Application number	US-201514630487-A
Country	US
Kind code	B2
Filing date	Feb 24, 2015
Priority date	Jun 13, 2012
Publication date	Jan 26, 2016
Grant date	Jan 26, 2016

Abstract

A photomask having a machine-readable identifying mark and suitable for manufacturing integrated circuit devices and a method for forming the photomask and identifying mark are disclosed. An exemplary embodiment includes receiving a design layout corresponding to a pattern to be formed on a photomask blank. A specification of an identifying code is also received along with the photomask blank, which includes a substrate, a reflective layer, and an absorptive layer. A first patterning is performed using the design layout. A second patterning is performed using the specification of the identifying code.

First claim

What is claimed is:

1. A method for manufacturing a photomask, the method comprising:
receiving a design layout corresponding to a pattern to be formed on a photomask blank;
receiving a specification of an identifying code;
receiving the photomask blank including a substrate, a reflective layer, and an absorptive layer;
performing a first patterning using the design layout; and
performing a second patterning using the specification of the identifying code.

2. The method of claim 1 ,
wherein the performing of the first patterning includes performing a first patterning of the absorptive layer; and
wherein the performing of the second patterning includes performing a second patterning of the absorptive layer and performing a patterning of the reflective layer.

3. The method of claim 2 ,
wherein the performing of the first patterning of the absorptive layer includes configuring the absorptive layer to transmit radiation through a first region of the absorptive layer;
wherein the performing of the second patterning of the absorptive layer includes configuring the absorptive layer to transmit radiation through a second region of the absorptive layer; and
wherein the performing of the patterning of the reflective layer includes configuring the reflective layer to transmit radiation through a region of the reflective layer.

4. The method of claim 3 , wherein the second region of the absorptive layer and the region of the reflective layer correspond to the identifying code.

5. The method of claim 1 , wherein the design layout includes the specification of the identifying code, and wherein performing the first patterning excludes the identifying code from the first patterning.

6. The method of claim 1 ,
wherein the specification of the identifying code includes a specification of a feature of a first type;
wherein the method further comprises modifying the specification of the identifying code by substituting a specification of a feature of a second type for the specification of the feature of the first type; and
wherein the performing of the second patterning is performed using the modified specification of the identifying code.

7. The method of claim 6 , wherein the feature of the first type is a high-intensity feature, and wherein the feature of the second type is a low-intensity feature.

8. The method of claim 1 ,
wherein the performing of the first patterning includes patterning a first photoresist layer with a first pattern and transferring the first pattern to the absorptive layer; and
wherein the performing of the second patterning includes patterning a second photoresist layer with a second pattern and transferring the second pattern to the absorptive layer and the reflective layer.

9. A method of manufacturing, the method comprising:
receiving a photomask including a substrate, a reflective structure disposed on the substrate, and an absorptive structure disposed on the reflective structure;
performing a first patterning process to remove a first portion of the absorptive structure without removing an underlying portion of the reflective structure, whereby the first patterning process defines a circuit feature; and
performing a second patterning process to remove a second portion of the absorptive structure and a portion of the reflective structure underlying the second portion of the absorptive structure, whereby the second patterning process defines an identifying code.

10. The method of claim 9 , wherein the photomask further includes a chucking layer disposed on the substrate opposite the reflective structure, and wherein the second patterning process removes the portion of the reflective structure from directly above the chucking layer.

11. The method of claim 9 ,
wherein the first patterning process removes to a depth such that radiation transmits through a respective region of the reflective structure, and
wherein the second patterning process removes to a depth such that radiation transmits through a respective region of the absorptive structure.

12. The method of claim 9 further comprising receiving a design specification specifying the circuit feature and the identifying code, and wherein the first patterning process and the second patterning process are performed based on the design specification.

13. The method of claim 12 ,
wherein the design specification includes a first code feature of a first type corresponding to the identifying code,
wherein the method further comprises substituting a second code feature of a second type for the first code feature, and
wherein the second patterning process is performed based on the substituted second code feature.

14. The method of claim 13 , wherein the first code feature of the first type is a high-intensity feature, and wherein the second code feature of the second type is a low-intensity feature.

15. The method of claim 9 ,
wherein the first patterning process includes patterning a first photoresist layer and transferring the first pattern to the absorptive structure, and
wherein the second patterning process includes patterning a second photoresist layer with a second pattern and transferring the second pattern to the absorptive structure and the reflective structure.

16. A method of mask making, the method comprising:
receiving a mask that includes:
a chucking layer;
a substrate disposed on the chucking layer;
a multilayer mirror disposed on the substrate; and
an absorptive layer disposed on the multilayer mirror;

removing a first portion of the absorptive layer to define a circuit feature; and
removing a second portion of the absorptive layer and a portion of the multilayer mirror underlying the second portion of absorptive layer to define a mask identifying feature, wherein the mask identifying feature is disposed over the chucking layer.

17. The method of claim 16 , wherein the removing of the underlying portion of the multilayer mirror removes to a depth such that radiation transmits through the multilayer mirror within the mask identifying feature.

18. The method of claim 16 ,
wherein the removing of the first portion of the absorptive layer includes patterning a first photoresist layer and transferring the first pattern to the absorptive layer, and
wherein the removing of the second portion of the absorptive layer second patterning process includes patterning a second photoresist layer and transferring the second pattern to the absorptive structure and the multilayer mirror.

19. The method of claim 16 further comprising receiving a design specification specifying the circuit feature and the mask identifying feature, wherein the first patterning process and the second patterning process are performed based on the design specification.

20. The method of claim 19 further comprising replacing a high-intensity feature of the design specification corresponding to the mask identifying feature with a low-intensity feature.

Assignees

• Taiwan Semiconductor Mfg

Inventors

• Lee Hsin-Chang
• Chen Chia-Jen
• Hsu Pei-Cheng
• Yen Anthony

Classifications

• G03F1/50

  Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof · CPC title

• G03F1/70

  Adapting basic layout or design of masks to lithographic process requirements, e.g., second iteration correction of mask patterns for imaging · CPC title

• G06F30/39

  Circuit design at the physical level (physical level design for reconfigurable circuits G06F30/347) · CPC title

• G03F1/44

  Testing or measuring features, e.g. grid patterns, focus monitors, sawtooth scales or notched scales · CPC title

• G03F1/38

  Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof · CPC title