Method of improving getter efficiency by increasing superficial area

Patent metadata

Field	Value
Publication number	US-9242853-B2
Application number	US-201314053751-A
Country	US
Kind code	B2
Filing date	Oct 15, 2013
Priority date	Oct 15, 2013
Publication date	Jan 26, 2016
Grant date	Jan 26, 2016

Abstract

The present disclosure relates to a method of gettering that provides for a high efficiency gettering process by depositing a gettering material on a roughened substrate surface, and an associated apparatus. In some embodiments, the method is performed by providing a substrate into a processing chamber having residual gases. One or more cavities are formed in the substrate at locations between bonding areas on a top surface of the substrate. Respective cavities have roughened interior surfaces that vary in a plurality of directions. A getter layer is deposited into the one or more cavities. The roughened interior surfaces of the one or more cavities enable the substrate to more effectively absorb the residual gases, thereby increasing the efficiency of the gettering process.

First claim

What is claimed is:

1. A method of forming getter material, comprising:
providing a substrate into a processing chamber having one or more residual gases;
forming one or more cavities located between bonding areas on a top surface of the substrate by selectively forming a hard mask on the top surface of the substrate to define the location of the one or more cavities, and selectively exposing the substrate to an etchant that removes parts of the substrate in areas not masked by the hard mask, wherein respective cavities have a roughened interior lower surface and roughened sidewall surfaces; and
forming a getter layer configured to absorb the one or more residual gases within the one or more cavities by depositing the getter layer onto the hard mask and within the one or more cavities, and removing the hard mask and the getter layer from the bonding areas.

2. The method of claim 1 , wherein forming the one or more cavities comprises selectively etching the substrate using an etchant comprising a roughing agent.

3. The method of claim 2 , wherein the roughing agent comprises xenon difluoride (XeF 2 ) or sulfur hexaflouride (SF 6 ).

4. The method of claim 1 , wherein forming the one or more cavities comprises selectively depositing a layer of corrugated material having an uneven thickness onto substantially smooth surfaces within the one or more cavities.

5. The method of claim 1 , further comprising:
depositing a eutectic metal configured to enable a eutectic bonding onto the top surface of the substrate at positions within the bonding areas.

6. The method of claim 5 , further comprising:
bringing a device wafer, comprising one or more MEMs (microelectromechanical system) devices, into contact with the eutectic metal to form one or more sealed chambers abutting the one or more MEMs devices.

7. A method of forming getter material, comprising:
selectively etching a substrate using an etchant to form one or more cavities that have substantially smooth interior surfaces; and
depositing a layer of corrugated material onto the substantially smooth interior surfaces of the one or more cavities, wherein the layer of corrugated material forms roughened interior surfaces within the one or more cavities; and
depositing a getter layer configured to absorb residual gases onto the roughened interior surfaces.

8. The method of claim 7 , further comprising:
depositing a eutectic metal configured to enable a eutectic bonding over the substrate.

9. The method of claim 8 , further comprising:
selectively etching the eutectic metal to remove the eutectic metal from within the one or more cavities.

10. The method of claim 8 , further comprising:
bringing a device wafer, comprising one or more MEMs (microelectromechanical system) devices, into contact with the eutectic metal to form one or more sealed chambers abutting the one or more MEMs devices.

11. The method of claim 7 , wherein the layer of corrugated material comprises a layer of HSG (hemispherical grained silicon) deposited by way of a chemical vapor deposition process.

12. The method of claim 7 , wherein the layer of corrugated material comprises a spin-on-glass.

13. A method of forming getter material, comprising:
selectively etching one or more cavities in a substrate at positions between bonding areas according to a hard mask, wherein respective cavities have roughened interior surfaces;
depositing a getter layer onto the roughened interior surfaces within the one or more cavities;
removing the hard mask;
depositing a bonding layer onto the substrate within the bonding areas;
removing the bonding layer from within the one or more cavities in a manner that leaves the bonding layer within the bonding areas; and
bonding the substrate to a device substrate comprising one or more MEMs devices at an interface comprising the bonding layer to form one or more hermetically sealed chambers respectively abutting the one or more MEMs devices.

14. The method of claim 13 , wherein the roughened interior surfaces comprise an uneven surface of the substrate.

15. The method of claim 13 , wherein the roughened interior surfaces comprise a layer of corrugated material having a varying thickness disposed within the one or more cavities over substantially smooth surfaces comprising a material of the substrate.

16. The method of claim 15 , wherein the layer of corrugated material comprises a spin-on-glass.

17. The method of claim 15 , wherein the layer of corrugated material comprises a layer of HSG (hemispherical grained silicon) deposited by way of a chemical vapor deposition process.

18. The method of claim 13 , wherein the getter layer comprises barium (Ba), titanium (Ti), zirconium (Zr), hafnium (Hf), vanadium (V), iron (Fe), cobalt (Co), aluminum (Al), or silicon (Si).

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Hsieh Yuan-Chih
• Chu Li-Cheng
• Lin Hung-Hua
• Chan Chih-Jen
• Chao Lan-Lin

Classifications

• H10P95/405

  using cavities formed by hydrogen or noble gas ion implantation · CPC title

• H10W76/48

  Fillings including materials for absorbing or reacting with moisture or other undesired substances · CPC title

• B81C1/00285 Primary

  using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters · CPC title

• B81B2201/0235

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• B81B2201/0242

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