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US-9222872-B2 · Dec 29, 2015 · US
Defect inspection method and device therefor
US9239283B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9239283-B2 |
| Application number | US-201113993888-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 8, 2011 |
| Priority date | Dec 13, 2010 |
| Publication date | Jan 19, 2016 |
| Grant date | Jan 19, 2016 |
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Abstract
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To process a signal from a plurality of detectors without being affected by a variation in the height of a substrate, and to detect more minute defects on the substrate, a defect inspection device is provided with a photoelectric converter having a plurality of rows of optical sensor arrays in each of first and second light-collecting/detecting unit and a processing unit for processing a detection signal from the first and the second light-collecting/detecting unit to determine the extent to which the positions of the focal points of the first and the second light-collecting/detecting unit are misaligned with respect to the surface of a test specimen, and processing the detection signal to correct a misalignment between the first and the second light-collecting/detecting unit, and the corrected detection signal outputted from the first and the second light-collecting/detecting unit are combined together to detect the defects on the test specimen.
First claim
Opening claim text (preview).
The invention claimed is: 1. A defect inspection device, comprising: a stage unit which is movable at least in one direction with a test specimen placed thereon; a light irradiation unit which irradiates the test specimen placed on the stage unit with linearly shaped light from a direction inclined relative to a normal direction of a surface of the stage on which the test specimen is placed; a first light collecting/detecting unit which collects and detects light reflected/scatt…
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Physics · mapped topic
- G01N21/00Primary
Physics · mapped topic
- G01N21/956Primary
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
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Frequently asked questions
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- What does patent US9239283B2 cover?
- To process a signal from a plurality of detectors without being affected by a variation in the height of a substrate, and to detect more minute defects on the substrate, a defect inspection device is provided with a photoelectric converter having a plurality of rows of optical sensor arrays in each of first and second light-collecting/detecting unit and a processing unit for processing a detect…
- Who is the assignee on this patent?
- Honda Toshifumi, Shibata Yukihiro, Taniguchi Atsushi, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification G01N21/00. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Jan 19 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).