Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type
US-10481500-B2 · Nov 19, 2019 · US
US9217852B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9217852-B2 |
| Application number | US-201213597919-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 29, 2012 |
| Priority date | Jan 31, 2012 |
| Publication date | Dec 22, 2015 |
| Grant date | Dec 22, 2015 |
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An optical inspection system for nondestructive internal visual inspection and non-contact infra-red (IR) temperature monitoring of an online, operating power generation turbine. The optical inspection system includes an optical tube having a viewing port, at least one reflective mirror or a mirror array having a reflectivity spectral range from 550 nm to 20 μm, and capable of continuous operation at temperatures greater than 932 degrees Fahrenheit (500 degrees Celsius), and a transparent window with high transmission within the same spectral range mounted distal the viewing port. The same optical mirror array may be used to measure selectively surface temperature of metal turbine blades in the near IR range (approximately 1 μm wavelength) and of thermal barrier coated turbine blades in the long IR range (approximately 10 μm wavelength).
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What is claimed is: 1. A turbine visual image inspection apparatus comprising: an optical tube housing having a viewing port; and a visual image reflective mirror array within the optical tube housing in optical alignment with the viewing port, having a concave objective mirror for capturing an optical visual image within its objective field of view and a convex focal mirror for focusing the captured image on a focal plane, the mirrors having spectral reflectivity from 550 nm t…
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