Composite substrate of gallium nitride and metal oxide

Patent metadata

Field	Value
Publication number	US-9224817-B2
Application number	US-201313781509-A
Country	US
Kind code	B2
Filing date	Feb 28, 2013
Priority date	Apr 7, 2006
Publication date	Dec 29, 2015
Grant date	Dec 29, 2015

Abstract

The present invention discloses a novel composite substrate which solves the problem associated with the quality of substrate surface. The composite substrate has at least two layers comprising the first layer composed of Ga x Al y In 1-x-y N (0≦x≦1, 0≦x+y≦1) and the second layer composed of metal oxide wherein the second layer can be removed with in-situ etching at elevated temperature. The metal oxide layer is designed to act as a protective layer of the first layer until the fabrication of devices. The metal oxide layer is designed so that it can be removed in a fabrication reactor of the devices through gas-phase etching by reactive gas such as ammonia.

First claim

What is claimed is:

1. A composite substrate for device fabrication comprising a first layer composed of Ga x Al y In 1-x-y N (0<x<1, 0<x+y1) and a second layer attached to a surface of the first layer, wherein the second layer is composed of a metal oxide which can be removed by in-situ etching in a device fabrication reactor, and wherein the metal oxide contains a mixture of silicon dioxide and at least one oxide of gallium, aluminum, indium, zinc, magnesium, calcium, sodium, tin and titanium, and wherein the second layer is sufficiently thick to prevent further oxidation of the first layer and sufficiently thin to be removed by said in-situ etching at 1050° C. or less with ammonia.

2. The composite substrate of claim 1 , wherein the metal oxide comprises gallium oxide.

3. The composite substrate of claim 1 , wherein the metal oxide is more than one atomic layer thick.

4. The composite substrate of claim 3 , wherein the thickness of the metal oxide is large enough to be detected with x-ray photoelectron spectroscopy.

5. The composite substrate of claim 1 , wherein the first layer comprises highly-oriented poly crystalline or single crystalline GaN.

6. The composite substrate of claim 5 , wherein the a density of dislocations and grain boundaries of the single crystalline GaN is less than 10 5 cm −2 .

7. The composite substrate of claim 5 , wherein the metal oxide is on a gallium face of the first layer.

8. The composite substrate of claim 5 , wherein the metal oxide is on a nitrogen face of the first layer.

9. The composite substrate of claim 5 , wherein the metal oxide is on a non-polar m-face or a-face of the first layer.

10. The composite substrate of claim 5 , wherein the metal oxide is on a gallium side semipolar face of the first layer.

11. The composite substrate of claim 5 , wherein the metal oxide is on a nitrogen side semipolar face of the first layer.

12. The composite substrate of claim 1 , wherein the metal oxide is deposited onto the first layer.

13. The composite substrate of claim 1 , wherein the first layer was formed using ammonothermal growth.

14. The composite substrate of claim 1 , wherein the metal oxide comprises gallium oxide.

15. The composite substrate of claim 14 , wherein the first layer a c-plane GaN substrate, and the silicon oxide and the gallium oxide are on a Ga-polar surface of the c-plane GaN.

16. The composite substrate of claim 15 , wherein the second layer has a thickness of a few monolayers.

17. The composite substrate of claim 4 , wherein the thickness of the metal oxide is at least 1 micron.

18. The composite substrate of claim 1 , wherein the metal oxide is in a form that can be etched during temperature ramp up from ambient temperature to 1050° C.

Assignees

• Sixpoint Materials Inc
• Seoul Semiconductor Co Ltd

Inventors

• Hashimoto Tadao

Classifications

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H10P50/283

  by chemical means · CPC title

• H10P14/3416

  Nitrides · CPC title

• H10P14/3238

  being insulating materials · CPC title

• H10P14/2908 Primary

  Nitrides · CPC title