Apparatus and method for removing a CMP pad from a platen

Patent metadata

Field	Value
Publication number	US-9221241-B2
Application number	US-201414191759-A
Country	US
Kind code	B2
Filing date	Feb 27, 2014
Priority date	Jan 10, 2012
Publication date	Dec 29, 2015
Grant date	Dec 29, 2015

Abstract

A method and apparatus for removing a pad adhesively secured to a platen. The apparatus includes a barrel assembly having a clamp assembly fixedly attached to a perimeter of the barrel assembly; a rotatable handle assembly nested within the barrel assembly; and a ratchet assembly nested between the handle assemble and the barrel assembly the ratchet assembly configured to engage the rotatable handle assembly.

First claim

What is claimed is:

1. An apparatus, comprising:
a barrel assembly comprising a first plate and a second plate spaced apart and arranged parallel to each other, said first plate and said second plate connected by multiple rods, said barrel assembly having a clamp assembly fixedly attached to a perimeter of said barrel assembly;
a rotatable handle assembly nested within said barrel assembly between said first plate and said second plate; and
a ratchet assembly nested between said first plate and said second plate and said ratchet assembly further nested between a portion of said rotatable handle assembly that is nested within said barrel assembly, said ratchet assembly configured to engage said handle assembly.

2. The apparatus of claim 1 , wherein said handle assembly is configured to rotate about a center of said barrel assembly.

3. The apparatus of claim 1 , wherein said ratchet assembly is moveable about an axis between a center of said barrel assembly and a perimeter of said barrel assembly.

4. The apparatus of claim 1 , wherein said ratchet assembly is configured to engage said handle assembly in at least three different positions of said handle assembly relative to said barrel assembly.

5. The apparatus of claim 1 , wherein said barrel assembly comprises:
a first rod connecting geometric centers of said first and second plates;
a second rod attaching said first and second plates at opposite first respective points between perimeters of said first and second plates and said geometric centers; and
a third rod attaching said first and second plates at opposite second respective points between said perimeters of said first and second plates and said geometric centers, said first rod between said second rod and said third rod.

6. The apparatus of claim 5 , wherein said handle assembly comprises:
a first L-shaped arm having first and second elongated members and a second L-shaped arm having first and second elongated members, said first arm and said second arm arranged parallel to each other, said first rod passing through corresponding holes in an end of said first elongated member of said first L-shaped arm and in an end of said first elongated member of said second L-shaped arm;
a fourth rod attaching said second elongated member of said first L-shaped arm to said second elongated member of said second L-shaped arm.

7. The apparatus of claim 6 , wherein said ratchet assembly comprises:
a first ratchet plate having and first end and a second end and a second ratchet plate having a first end and a second end, said first ratchet plate and said second ratchet spaced apart and arranged parallel to each other, said first ratchet plate having a first notch and a second notch connected by a first surface, said second ratchet plate having a first notch and a second notch connected by a second surface, said third rod passing through a hole in said first end of said first ratchet plate and said first end of said second ratchet plate.

8. The apparatus of claim 7 wherein:
in a first position, said first surface and said second surface rest on said fourth rod;
in a second position said fourth rod is engaged in said first notch of said first ratchet plate and in said first notch of said second ratchet plate; and
in a third position said fourth rod is engaged in said second notch of said first ratchet plate and in said second notch of said second ratchet plate.

9. The apparatus of claim 5 , wherein said clamp assembly comprises:
a first jaw fixed to said second rod; and
a second jaw movable about said second rod.

10. The apparatus of claim 9 , further including:
means for applying clamping force between said first jaw and said second jaw.

11. The apparatus of claim 9 , wherein said clamping device further comprises:
a first handle movably attached to said second jaw, said first handle including a clamp release lever; and
a second handle fixedly attached to first jaw, said second handle including a clamping force adjustment screw.

12. The apparatus of claim 1 , wherein said handle assembly is configured to engage notches in said ratchet assembly when moved in a first direction away from said clamp assembly and disengage said notches when moved a second direction toward said clamp assembly.

13. The apparatus of claim 1 , wherein said clamp assembly is completely external to said barrel assembly.

14. The apparatus of claim 13 , wherein said ratchet assembly is configured to engage said handle assembly in at least three different positions.

15. The apparatus of claim 1 , wherein said first plate and said second plate are both circular or wherein said first plate and said second plate are both oval.

16. The apparatus of claim 1 , wherein said clamping device is configured to grip a portion of a polishing pad.

Assignees

• Globalfoundries Inc

Inventors

• Bandy John J
• Bates Graham M
• Brigante Jeffery A

Classifications

• Y10T156/1978

  Delaminating bending means · CPC title

• B24B37/34

  Accessories · CPC title

• B24B37/20

  Lapping pads for working plane surfaces · CPC title

• Y10T156/1168

  Gripping and pulling work apart during delaminating · CPC title

• Y10T156/195

  Delaminating roller means · CPC title