Automated inspection system
US-2024420305-A1 · Dec 19, 2024 · US
Method and system for hybrid reticle inspection
US9208552B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9208552-B2 |
| Application number | US-201213814535-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 23, 2012 |
| Priority date | Apr 26, 2011 |
| Publication date | Dec 8, 2015 |
| Grant date | Dec 8, 2015 |
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Abstract
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A semiconductor inspection apparatus performs a hybrid inspection process including cell-to-cell inspection, die-to-die inspection and die-to-golden or die-to-database inspection. The apparatus creates a golden image of a reticle complimentary to portions of the reticle that can be inspected by cell-to-cell inspection or die-to-die inspection. Alternatively, the apparatus creates a reduced database complimentary to portions of the reticle that can be inspected by cell-to-cell inspection or die-to-die inspection.
First claim
Opening claim text (preview).
What is claimed is: 1. A inspection apparatus comprising: a processor; memory connected to the processor; computer executable program code configured to execute on the processor, wherein the computer executable program code is configured to: produce a reduced database containing portions of a semiconductor design database unsuitable for at least one of a cell-to-cell inspection or a die-to-die inspection and excluding portions of the semiconductor design database suitable f…
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Classifications
- G06T7/001Primary
Physics · mapped topic
Physics · mapped topic
- G06T7/0004Primary
Physics · mapped topic
Physics · mapped topic
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- What does patent US9208552B2 cover?
- A semiconductor inspection apparatus performs a hybrid inspection process including cell-to-cell inspection, die-to-die inspection and die-to-golden or die-to-database inspection. The apparatus creates a golden image of a reticle complimentary to portions of the reticle that can be inspected by cell-to-cell inspection or die-to-die inspection. Alternatively, the apparatus creates a reduced data…
- Who is the assignee on this patent?
- Hess Carl, Miller John D, Xue Shan, and 2 more
- What technology area does this patent fall under?
- Primary CPC classification G06T7/001. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Dec 08 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).