Memristors and methods of fabrication

Patent metadata

Field	Value
Publication number	US-9172035-B2
Application number	US-201114357783-A
Country	US
Kind code	B2
Filing date	Dec 12, 2011
Priority date	Dec 12, 2011
Publication date	Oct 27, 2015
Grant date	Oct 27, 2015

Abstract

Memristors and their fabrication are provided. A first dielectric layer is formed over one or more conductive pathways. Vias are formed in the dielectric layer and filled with conductive material. A second dielectric layer is formed there over, and vias are formed aligned with and extending to the filled vias. A reactant fluid is introduced into the vias such that a reacted portion of the conductive material is defined within the filled vias. The vias in the second dielectric layer are then filled with conductive material such that memristors are defined. Conductive pathways are then formed over and in contact with the memristors such that each is individually addressable.

First claim

What is claimed is:

1. A method, comprising:
defining a first via in a first dielectric layer;
forming a first conductive material within the first via;
forming a second dielectric layer over the first dielectric layer;
defining a second via in the second dielectric layer aligned within the first via and leading to the first conductive material, thereby exposing a portion of the first conductive material;
reacting the exposed portion of the first conductive material with at least one fluid species by way of the second via thereby forming a reacted portion of the first conductive material; and
forming a second conductive material within the second via in electrical contact with the reacted portion of the first conductive material, the second conductive material being selected from the group consisting of Tantalum (Ta), Tantalum Nitride (TaN x ), Tantalum Oxide (TaO x ), Titanium (Ti), Titanium Nitride (TiN x ), Titanium Oxide (TiO x ), Hafnium (Hf), Hafnium Nitride (HfN x ), Hafnium Oxide (HfO x ), Tungsten (W), Tungsten Nitride (WN x ), and Tungsten Oxide (WO x );
wherein the first conductive material, the reacted portion of the first conductive material, and the second conductive material define a memristor.

2. The method according to claim 1 , further comprising:
forming a first conductive pathway supported by a base dielectric layer;
forming the first dielectric layer over the first conductive pathway and the base dielectric layer, the forming of the first conductive material being performed such that the first conductive material is thereafter in electrical contact with the first conductive pathway; and
forming a second conductive pathway over the second dielectric layer and in electrical contact with the second conductive material.

3. The method according to claim 2 , wherein the base dielectric layer overlies a complimentary metal-oxide semiconductor (CMOS) circuit.

4. The method according to claim 1 , wherein the first conductive material is selected from the group consisting of Tantalum (Ta), Tantalum Nitride (TaN x ), Tantalum Oxide (TaO x ), Titanium (Ti), Titanium Nitride (TiN x ), Titanium Oxide (TiO x ), Hafnium (Hf), Hafnium Nitride (HfN x ), Hafnium Oxide (HfO x ), Tungsten (W), Tungsten Nitride (WN x ), and Tungsten Oxide (WO x ), wherein the at least one fluid species includes Oxygen (O x ), Nitrogen (N x ), Sulfur (S), Carbon (C), Boron (B), or Phosphorus (P), and wherein the second conductive material is in direct contact with the reacted portion of the first conductive material.

5. The method according to claim 1 , wherein the at least one fluid species includes Oxygen (O x ), Nitrogen (N x ), Sulfur (S), Carbon (C), Boron (B), or Phosphorus (P).

6. The method according to claim 1 , the first conductive material being different than the second conductive material.

7. The method according to claim 1 , the first conductive material being the same as the second conductive material.

8. The method according to claim 1 , wherein the defining of the first via in the first dielectric layer and the defining of the second via in the second dielectric layer are performed by way of a same photolithographic mask.

9. The method according to claim 1 , wherein the second conductive material is in direct contact with the reacted portion of the first conductive material.

10. A device, comprising:
a first conductive material formed within a first via of a first dielectric layer;
a reacted portion of the first conductive material being defined by a reaction of a portion of the first conductive material with at least one fluid species; and
a second conductive material formed within a second via of a second dielectric layer disposed over the first dielectric layer, the second conductive material being selected from the group consisting of Tantalum (Ta), Tantalum Nitride (TaN x ), Tantalum Oxide (TaO x ), Titanium (Ti), Titanium Nitride (TiN x ), Titanium Oxide (TiO x ), Hafnium (Hf), Hafnium Nitride (HfN x ), Hafnium Oxide (HfO x ), Tungsten (W), Tungsten Nitride (WN x ), and Tungsten Oxide (WO x ), and the second conductive material in contact with the reacted portion, the first conductive material and the reacted portion and the second conductive material defining a memristor characterized by a non-volatile electrical resistance.

11. The device according to claim 10 , further comprising a controller configured to adjust the non-volatile electrical resistance to one or more values within a range.

12. The device according to claim 11 , further comprising a common substrate, wherein the memristor and the controller being supported by the common substrate.

13. The device according to claim 11 , the controller further configured to sense a present value of the non-volatile electrical resistance.

14. The device according to claim 13 , the controller further configured to perform the sensing while preserving the present value of the non-volatile electrical resistance within a tolerance range.

15. The device according to claim 10 , wherein the first conductive material is selected from the group consisting of Tantalum (Ta), Tantalum Nitride (TaN x ), Tantalum Oxide (TaO x ), Titanium (Ti), Titanium Nitride (TiN x ), Titanium Oxide (TiO x ), Hafnium (Hf), Hafnium Nitride (HfN x ), Hafnium Oxide (HfO x ), Tungsten (W), Tungsten Nitride (WN x ), and Tungsten Oxide (WO x ), and wherein the at least one fluid species includes Oxygen (O x ), Nitrogen (N X ), Sulfur (S), Carbon (C), Boron (B), or Phosphorus (P).

Assignees

• Pickett Matthew
• Nickel Janice
• Hewlett Packard Development Co

Inventors

• Pickett Matthew
• Nickel Janice

Classifications

• H10B63/80

  Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays · CPC title

• H10D1/474

  comprising refractory metals, transition metals, noble metals, metal compounds or metal alloys, e.g. silicides · CPC title

• H10N70/8833

  Binary metal oxides, e.g. TaOx · CPC title

• H10N70/826 Primary

  adapted for essentially vertical current flow, e.g. sandwich or pillar type devices · CPC title

• H10N70/20 Primary

  Multistable switching devices, e.g. memristors · CPC title