Substrate correction device, substrate lamination device, substrate processing system, substrate correction method, substrate processing method, and semiconductor device manufacturing method
US-2024404859-A1 · Dec 5, 2024 · US
Apparatus for fabricating flat panel display, and apparatus and method for detecting quantity of static electricity thereof
US9170441B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9170441-B2 |
| Application number | US-43356006-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 15, 2006 |
| Priority date | Dec 28, 2005 |
| Publication date | Oct 27, 2015 |
| Grant date | Oct 27, 2015 |
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- Title
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Abstract
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A fabricating apparatus of a flat panel display device includes lift pins for lifting a substrate, a susceptor through which the lift pins pass, and a static electricity quantity detector for detecting a quantity of static electricity on the substrate by sensing when the susceptor separates from the substrate by sensing a traveled distance of the susceptor when the susceptor is separated from the substrate.
First claim
Opening claim text (preview).
What is claimed is: 1. A fabricating apparatus of a flat panel display device, comprising: lift pins for lifting a substrate; a susceptor through which the lift pins pass; a light emitter for transmitting light to a space between the susceptor and the substrate during descent of the susceptor; a light receiver for receiving the transmitted light; a traveled-distance sensing part for sensing the traveled distance of the susceptor; a controller for automatically determini…
Assignees
Inventors
Classifications
- H10P72/50Primary
Electricity · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
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- What does patent US9170441B2 cover?
- A fabricating apparatus of a flat panel display device includes lift pins for lifting a substrate, a susceptor through which the lift pins pass, and a static electricity quantity detector for detecting a quantity of static electricity on the substrate by sensing when the susceptor separates from the substrate by sensing a traveled distance of the susceptor when the susceptor is separated from t…
- Who is the assignee on this patent?
- Yeom Young Min, Lg Display Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10P72/50. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Oct 27 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).