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Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator
US9159592B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9159592-B2 |
| Application number | US-201314134705-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 19, 2013 |
| Priority date | Jun 18, 2005 |
| Publication date | Oct 13, 2015 |
| Grant date | Oct 13, 2015 |
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Abstract
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The present invention provides methods and apparatus capable of routine placement and replacement of fabricator tools in a designated tool location. The tool location can be selected from multiple tool locations arranged in a matrix with horizontal and vertical designations. The operation may be fully automated. In another aspect, the invention describes Cleanspace fabricators which use devices to routinely remove and place tooling.
First claim
Opening claim text (preview).
What is claimed is: 1. A Cleanspace fabricator comprising: a multilevel environment; multiple processing tools, wherein said multiple processing tools are oriented in the multilevel environment; and an automated tool replacement system, wherein the automated tool replacement system comprises: a robotic tool handler capable of transporting a processing tool, a connecting surface for the robotic tool handler, wherein said connecting surface is connectable to the processing…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H10P72/0458Primary
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US9159592B2 cover?
- The present invention provides methods and apparatus capable of routine placement and replacement of fabricator tools in a designated tool location. The tool location can be selected from multiple tool locations arranged in a matrix with horizontal and vertical designations. The operation may be fully automated. In another aspect, the invention describes Cleanspace fabricators which use devices…
- Who is the assignee on this patent?
- Flitsch Frederick A, Futrfab Inc
- What technology area does this patent fall under?
- Primary CPC classification H10P72/0458. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Oct 13 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).