Electronic device and manufacturing method thereof
US-2024404831-A1 · Dec 5, 2024 · US
Polishing composition, polishing method using same, and method for producing semiconductor device
US9150758B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9150758-B2 |
| Application number | US-201214007272-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 28, 2012 |
| Priority date | Mar 30, 2011 |
| Publication date | Oct 6, 2015 |
| Grant date | Oct 6, 2015 |
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Abstract
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The polishing composition of the present invention contains an oxidizing agent and a scratch-reducing agent represented by general formula (1) or (2) below. In the formulas, X 1 and X 2 are each independently a hydrogen atom, a hydroxyl group, a carboxyl group, a phosphate group, an alkyl group, an aryl group, an alkyl polyamine group, an alkyl polyphosphate group, an alkyl polycarboxylate group, an alkyl polyaminopolyphosphate group, or an alkyl polyaminopolycarboxylate group.
First claim
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The invention claimed is: 1. A polishing composition used in polishing a surface of an object to be polished that includes a first portion comprised of copper or a copper alloy and a second portion comprised of tantalum, tantalum nitride, a tantalum alloy, titanium, titanium nitride, a titanium alloy, tungsten, tungsten nitride, or a tungsten alloy, the composition comprising an oxidizing agent and a scratch-reducing agent represented by general formula (1) or (2) below,…
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Electricity · mapped topic
Electricity · mapped topic
- H10P52/00Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US9150758B2 cover?
- The polishing composition of the present invention contains an oxidizing agent and a scratch-reducing agent represented by general formula (1) or (2) below. In the formulas, X 1 and X 2 are each independently a hydrogen atom, a hydroxyl group, a carboxyl group, a phosphate group, an alkyl group, an aryl group, an alkyl polyamine group, an alkyl polyphosphate group, …
- Who is the assignee on this patent?
- Miller Anne, Saito Chiaki, Fukuda Kanako, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification H10P52/00. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Oct 06 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).