Linear motor device and method for controlling linear motor device
US-9318984-B2 · Apr 19, 2016 · US
Linear motor magnetic shield apparatus for lithographic systems
US9136751B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9136751-B2 |
| Application number | US-201213617543-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 14, 2012 |
| Priority date | Dec 31, 2008 |
| Publication date | Sep 15, 2015 |
| Grant date | Sep 15, 2015 |
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Abstract
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A magnetic shield having non-magnetic gaps provides reduced magnetic cross-talk for a linear motor array in a precision positioning system. Redirecting the leakage flux limits the cross-talk and associated deleterious effects. Such preferred magnetic circuit paths for the leakage are affixed to the moving magnet system of the linear motor. Embodiments of the preferred flux leakage paths are realized by providing a ferromagnetic shield separated by a non-magnetic gap between the permanent magnets and the back-irons. In another embodiment, the ferromagnetic shield separation includes diamagnetic materials.
First claim
Opening claim text (preview).
What is claimed is: 1. A device manufacturing method, comprising: projecting a patterned beam of radiation toward a substrate stage; positioning the substrate stage using a linear motor, the linear motor comprising: a first back iron and a second back iron extending in a first direction; a first plurality of magnetized poles arranged with alternating polarity to each other in the first direction, wherein the first plurality of magnetized poles are coupled to the first back ir…
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Electricity · mapped topic
- H02K41/03Primary
Electricity · mapped topic
Electricity · mapped topic
Physics · mapped topic
Electricity · mapped topic
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- What does patent US9136751B2 cover?
- A magnetic shield having non-magnetic gaps provides reduced magnetic cross-talk for a linear motor array in a precision positioning system. Redirecting the leakage flux limits the cross-talk and associated deleterious effects. Such preferred magnetic circuit paths for the leakage are affixed to the moving magnet system of the linear motor. Embodiments of the preferred flux leakage paths are rea…
- Who is the assignee on this patent?
- Mankala Kalyan Kumar, Wiener Roberto Bernardo, Govil Pradeep Kumar, and 2 more
- What technology area does this patent fall under?
- Primary CPC classification H02K41/03. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Sep 15 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).