Linear motor magnetic shield apparatus for lithographic systems
US-9136751-B2 · Sep 15, 2015 · US
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Mankala Kalyan Kumar patents
Mankala Kalyan Kumar holds 2 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 2 |
| Recent patents | 0 |
| First publication | Sep 8, 2015 |
| Latest publication | Sep 15, 2015 |
Filing trend
Year-over-year patent counts for this assignee.
Not enough yearly data to assess filing trend yet.
| Year | Patents |
|---|---|
| 2015 | 2 |
| Year | Patents |
|---|---|
| 2015 | 2 |
Recent patents
Latest publications where this party is an assignee.
Linear motor magnetic shield apparatus
US-9130443-B2 · Sep 8, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Linear motor magnetic shield apparatus for lithographic systems
US-9136751-B2 · Sep 15, 2015 · US
Linear motor magnetic shield apparatus
US-9130443-B2 · Sep 8, 2015 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Physics | 2 |
| Electricity | 2 |