Chip identification pattern and method of forming

US9136222B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9136222-B2
Application numberUS-201213469386-A
CountryUS
Kind codeB2
Filing dateMay 11, 2012
Priority dateMay 11, 2012
Publication dateSep 15, 2015
Grant dateSep 15, 2015

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  2. Abstract

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  5. First independent claim

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Abstract

Official abstract text for this publication.

Various embodiments disclosed include methods of performing a double exposure process on a level of an integrated circuit (IC) chip to form an IC chip having an embedded electrically measurable identifier. In some cases, the method includes: exposing a level of an integrated circuit (IC) chip using a first mask orientation; subsequently exposing the level of the IC chip using a second mask orientation distinct from the first mask orientation; and developing the level of the IC chip to form an electrically measurable identifier on the IC chip.

First claim

Opening claim text (preview).

We claim: 1. A method comprising: overlaying a first mask, at a first orientation, over a level of an integrated circuit (IC) chip, wherein the level of the IC chip includes a photosensitive material; exposing the level of the IC chip, through the first mask, to a light source to form a first pattern in the level of the IC chip; overlaying the first mask, at a second orientation distinct from the first orientation, over the level of the IC chip after the exposing to form the f…

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What does patent US9136222B2 cover?
Various embodiments disclosed include methods of performing a double exposure process on a level of an integrated circuit (IC) chip to form an IC chip having an embedded electrically measurable identifier. In some cases, the method includes: exposing a level of an integrated circuit (IC) chip using a first mask orientation; subsequently exposing the level of the IC chip using a second mask orie…
Who is the assignee on this patent?
Amoah Yoba, Ellis-Monaghan John J, Kuo Roger C, and 3 more
What technology area does this patent fall under?
Primary CPC classification H10W46/00. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Sep 15 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).