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Substrate transport apparatus, substrate transport method, and recording medium
US9136152B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9136152-B2 |
| Application number | US-201213410447-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 2, 2012 |
| Priority date | Mar 7, 2011 |
| Publication date | Sep 15, 2015 |
| Grant date | Sep 15, 2015 |
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- Title
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Abstract
Official abstract text for this publication.
A substrate transport apparatus includes a first fork which is disposed to be movable in a forward/backward direction to a substrate holding part to transport a stacked member to or receive the stacked member from the substrate holding part. A second fork is arranged to be reversible and disposed above the first fork to be movable in a forward/backward direction to an accommodating part that accommodates substrates and spacer members to transport a substrate or a spacer member between the accommodating part and the first fork. A first grip module is disposed on a first surface of the second fork to hold and support the substrate from an upward direction. A second grip module is disposed on the first surface of the second fork on the same side as the first grip module to hold and support the spacer member from an upward direction.
First claim
Opening claim text (preview).
What is claimed is: 1. A substrate transport apparatus which transports a set of a plurality of sets of stacked members to a substrate holding part containing a plurality of said sets of stacked members, each set of stacked members including two substrates with adjacent back surfaces thereof stacked via a spacer member, where the plurality of sets of the stacked members are held at predetermined intervals in an up/down direction, the substrate transport apparatus comprising: a fir…
Assignees
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9136152B2 cover?
- A substrate transport apparatus includes a first fork which is disposed to be movable in a forward/backward direction to a substrate holding part to transport a stacked member to or receive the stacked member from the substrate holding part. A second fork is arranged to be reversible and disposed above the first fork to be movable in a forward/backward direction to an accommodating part that ac…
- Who is the assignee on this patent?
- Oyama Katsuhiko, Takeuchi Yasushi, Tokyo Electron Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10P72/12. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Sep 15 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).