Laser apparatus and laser apparatus manufacturing method
US-2016365694-A1 · Dec 15, 2016 · US
System and method for generating extreme ultraviolet light
US9113540B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9113540-B2 |
| Application number | US-201213492067-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 8, 2012 |
| Priority date | Feb 19, 2010 |
| Publication date | Aug 18, 2015 |
| Grant date | Aug 18, 2015 |
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Abstract
Official abstract text for this publication.
A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the laser beam, and a target supply unit configured to supply a target material into the chamber, the target material being irradiated with the laser beam for generating extreme ultraviolet light.
First claim
Opening claim text (preview).
What is claimed is: 1. A system comprising: a chamber; a laser beam apparatus configured to generate a laser beam to be introduced into the chamber; a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the laser beam; and a target supply unit configured to supply a target material into the chamber, the target material being irradiated with the laser beam for generating extreme ultraviolet light, wherein the laser beam a…
Assignees
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Classifications
Electricity · mapped topic
- H05G2/0088Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9113540B2 cover?
- A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the laser beam, and a target supply unit configured to supply a target material into the chamber, the target material being irradiated with the laser beam for genera…
- Who is the assignee on this patent?
- Hori Tsukasa, Kakizaki Kouji, Yanagida Tatsuya, and 2 more
- What technology area does this patent fall under?
- Primary CPC classification H05G2/0088. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Aug 18 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).