Force sensing system for substrate lifting apparatus

Patent metadata

Field	Value
Publication number	US-9108322-B2
Application number	US-201313918128-A
Country	US
Kind code	B2
Filing date	Jun 14, 2013
Priority date	Apr 29, 2013
Publication date	Aug 18, 2015
Grant date	Aug 18, 2015

Abstract

A system and method for monitoring forces on a substrate lifting apparatus. The system includes a platen cartridge with a platen and a movable lifting portion. The movable lifting portion includes a plurality of lifting arms coupled to a plurality of lift pins. A plurality of force sensing elements are associated with respective ones of the plurality of lifting arms and the plurality of lift pins. A controller receives signals from the plurality of force sensing elements, correlates the signals to respective forces applied to said plurality of lift pins. The correlated forces may indicate to the controller that an error condition exists, such as a stuck wafer, a broken wafer, a mis-positioned wafer, or a mechanical malfunction.

First claim

The invention claimed is:

1. A system for monitoring force on a substrate lifting apparatus, comprising:
a platen cartridge including a platen and a movable lifting portion, the movable lifting portion comprising a plurality of lifting arms coupled to a plurality of lift pins, the plurality of lifting arms coupled at respective proximal ends to a central hub;
a plurality of force sensing elements associated with respective ones of said plurality of lifting arms and said pluralit…

Assignees

• Varian Semiconductor Equipment

Inventors

• Chisholm Richard V
• Peitzsch Scott E
• Esposito Michael
• Poitras Robert A
• Anella Steven M
• Hall Daniel A
• Holden Scott C
• Fish Roger B

Classifications

• H10P72/7612

  Electricity · mapped topic

• H10P72/0616

  Electricity · mapped topic

• Y10S901/02

  Cross-Sectional Technologies · mapped topic

• B25J13/085 Primary

  Operations & Transport · mapped topic

• H01L21/67288

  Electricity · mapped topic