Monolithic integrated composite group III-V and group IV device

US9105566B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9105566-B2
Application numberUS-201313968840-A
CountryUS
Kind codeB2
Filing dateAug 16, 2013
Priority dateDec 10, 2009
Publication dateAug 11, 2015
Grant dateAug 11, 2015

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  2. Abstract

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  5. First independent claim

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Abstract

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According to one disclosed embodiment, a method for fabricating a monolithic integrated composite device comprises forming a group III-V semiconductor body over a group IV semiconductor substrate, forming a trench in the group III-V semiconductor body, and forming a group IV semiconductor body in the trench. The method also comprises fabricating at least one group IV semiconductor device in the group IV semiconductor body, and fabricating at least one group III-V semiconductor device in the group III-V semiconductor body. In one embodiment, the method further comprises planarizing an upper surface of the III-V semiconductor body and an upper surface of the group IV semiconductor body to render those respective upper surfaces substantially co-planar. In one embodiment, the method further comprises fabricating at least one passive device in a defective region of said group IV semiconductor body adjacent to a sidewall of the trench.

First claim

Opening claim text (preview).

The invention claimed is: 1. A monolithic integrated composite device comprising: a group IV semiconductor body formed in a trench in a group III-V semiconductor body situated over a group IV semiconductor substrate, said group IV semiconductor body including first and second defective regions adjacent to respective first and second sidewalls of said trench; and at least one passive device fabricated in at least one of said first and said second defective regions.…

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What does patent US9105566B2 cover?
According to one disclosed embodiment, a method for fabricating a monolithic integrated composite device comprises forming a group III-V semiconductor body over a group IV semiconductor substrate, forming a trench in the group III-V semiconductor body, and forming a group IV semiconductor body in the trench. The method also comprises fabricating at least one group IV semiconductor device in the…
Who is the assignee on this patent?
Int Rectifier Corp
What technology area does this patent fall under?
Primary CPC classification H10D84/0123. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).