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Inspection system, inspection image data generation method, inspection display unit, defect determination method, and storage medium on which inspection display program is recorded
US9105445B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9105445-B2 |
| Application number | US-201414220719-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 20, 2014 |
| Priority date | Mar 21, 2013 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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- Title
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Abstract
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An inspection system includes a primary optical system configured to irradiate a charged particle or an electromagnetic wave as a beam, a movable unit configured to hold an inspection target and move the target through a position where the beam is irradiated, and a TDI sensor configured to integrate an amount of secondary charged particles in a predetermined direction to sequentially transfer the integrated amount. The secondary charged particles are obtained by irradiating the beam onto the target while moving the movable unit in the predetermined direction. The inspection system further includes a prevention module configured to prevent an arrival of the beam at the target side or an arrival of the secondary charged particles at the TDI sensor during a time period from one transfer to the following transfer after the elapse of a predetermined length of time from the one transfer and until the following transfer.
First claim
Opening claim text (preview).
What is claimed is: 1. An inspection system comprising: a primary optical system configured to irradiate either of a charged particle and an electromagnetic wave as a beam; a movable unit configured to hold an inspection target and move the inspection target through a position where the beam is irradiated by the primary optical system in a predetermined direction; a TDI sensor configured to integrate an amount of secondary charged particles in a predetermined direction through…
Assignees
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Classifications
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H01J37/222Primary
Electricity · mapped topic
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- What does patent US9105445B2 cover?
- An inspection system includes a primary optical system configured to irradiate a charged particle or an electromagnetic wave as a beam, a movable unit configured to hold an inspection target and move the target through a position where the beam is irradiated, and a TDI sensor configured to integrate an amount of secondary charged particles in a predetermined direction to sequentially transfer t…
- Who is the assignee on this patent?
- Ebara Corp
- What technology area does this patent fall under?
- Primary CPC classification H01J37/222. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).