Method and System for Positioning Center of V-Type Notch of Wafer, and Computer Storage Medium
US-2024266198-A1 · Aug 8, 2024 · US
US9103667B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9103667-B2 |
| Application number | US-201414341744-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 25, 2014 |
| Priority date | Jul 26, 2013 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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An alignment method for optical axes of a composite waveplate includes rotating a rotatable waveplate, which rotates about a central axis with respect to a fixed waveplate, and adjusting the rotation angle thereof until the differences between the spectral parameters of the composite waveplate and ideal spectral parameters are smaller than preset values.
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The invention claimed is: 1. A method for aligning optical axes of a composite waveplate, for any two adjacent waveplates of the composite waveplate, the method comprising: a) fixing a first one of the two adjacent waveplates to be a fixed waveplate and arranging the second one of the two adjacent waveplates to be a rotatable waveplate in parallel to the fixed waveplate and capable of rotating about a central axis with respect to the fixed waveplate; b) vertically irradiating po…
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
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