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Processing apparatus and film forming method

US9103029B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9103029-B2
Application numberUS-201113161874-A
CountryUS
Kind codeB2
Filing dateJun 16, 2011
Priority dateJun 18, 2010
Publication dateAug 11, 2015
Grant dateAug 11, 2015

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  6. CPC / IPC classifications

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  7. Citations and related patents

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Abstract

Official abstract text for this publication.

A processing apparatus for processing objects, includes: a processing container structure having a bottom opening and including a processing container having a processing space for housing the objects, the container having a nozzle housing area on one side of the processing space and a slit-like exhaust port on the opposite side of the processing space from the nozzle housing area; a lid for closing the bottom opening of the processing container structure; a support structure for supporting the objects and which can be inserted into and withdrawn from the processing container structure; a gas introduction means including a gas nozzle housed in the nozzle housing area; an exhaust means including a plurality of exhaust systems for exhausting the atmosphere in the processing container structure; a heating means for heating the objects; and a control means for controlling the gas introduction means, the exhaust means and the heating means.

First claim

Opening claim text (preview).

What is claimed is: 1. A processing apparatus for carrying out predetermined processing of a plurality of processing objects, comprising: a processing container structure having a bottom opening and including a processing container having a processing space for housing the processing objects and a cover container surrounding an exterior of the processing container, said processing container having a nozzle housing area on one side of the processing space and a slit-like exhaust po…

Assignees

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View patent family 45329056

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Frequently asked questions

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What does patent US9103029B2 cover?
A processing apparatus for processing objects, includes: a processing container structure having a bottom opening and including a processing container having a processing space for housing the objects, the container having a nozzle housing area on one side of the processing space and a slit-like exhaust port on the opposite side of the processing space from the nozzle housing area; a lid for cl…
Who is the assignee on this patent?
Wamura Yu, Morozumi Yuichiro, Sato Izumi, and 2 more
What technology area does this patent fall under?
Primary CPC classification C23C16/4412. Mapped technology areas include Chemistry & Metallurgy.
When was this patent published?
Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).