Edge finishing apparatus

Patent metadata

Field	Value
Publication number	US-9102030-B2
Application number	US-201113169499-A
Country	US
Kind code	B2
Filing date	Jun 27, 2011
Priority date	Jul 9, 2010
Publication date	Aug 11, 2015
Grant date	Aug 11, 2015

Abstract

An edge finishing apparatus includes a surface, a fluid delivery device configured to deliver at least one magnetorheological polishing fluid (MPF) ribbon to the at least one well, at least one magnet placed adjacent to the surface to selectively apply a magnetic field in a vicinity of the surface, and at least one holder placed in opposing relation to the surface, the at least one holder being configured to support at least one article such that an edge of the at least one article can be selectively immersed in the MPF ribbon delivered to the at least one well.

First claim

What is claimed is:

1. An edge finishing apparatus comprising:
a belt having at least one continuous channel formed therein;
a fluid delivery device configured to deliver a magnetorheological polishing fluid (MPF) ribbon to the at least one continuous channel;
at least one magnet placed adjacent to the belt to selectively apply a magnetic field in a vicinity of the belt; and
at least one holder placed in opposing relation to the belt, the at least one holder being configured to support at least one article such that an edge of the at least one article can be selectively immersed in the MPF ribbon delivered to the at least one continuous channel.

2. The edge finishing apparatus of claim 1 , further comprising a translation device coupled to the at least one holder, the translation device being operable to translate the at least one holder relative to the belt along at least one of a direction orthogonal to the belt and a direction parallel to the belt.

3. The edge finishing apparatus of claim 1 , wherein the at least one holder is configured to rotate the at least one article relative to the at least one continuous channel.

4. The apparatus of claim 1 , wherein the belt comprises a continuous loop and the loop has at least one section that is flat.

5. The apparatus of claim 1 , wherein the belt is movably supported.

6. The apparatus of claim 1 , further comprising a fluid collection device configured to collect the MPF from the at least one continuous channel.

7. The apparatus of claim 1 , wherein the cylindrical wheel is movably supported.

8. The apparatus of claim 1 , further comprising a fluid collection device configured to collect the MPF from the at least one continuous channel.

9. An edge finishing apparatus comprising:
a cylindrical wheel having at least one continuous channel formed therein;
a fluid delivery device configured to deliver a magnetorheological polishing fluid (MPF) ribbon to the at least one continuous channel;
at least one magnet placed adjacent to the cylindrical wheel to selectively apply a magnetic field in a vicinity of the cylindrical wheel; and
at least one holder placed in opposing relation to the cylindrical wheel, the at least one holder being configured to support at least one article such that an edge of the at least one article can be selectively immersed in the MPF ribbon delivered to the at least one continuous channel.

10. The edge finishing apparatus of claim 9 , further comprising a translation device coupled to the at least one holder, the translation device being operable to translate the at least one holder relative to the cylindrical wheel along at least one of a direction orthogonal to the cylindrical wheel and a direction parallel to the cylindrical wheel.

11. The edge finishing apparatus of claim 9 , wherein the at least one holder is configured to rotate the at least one article relative to the at least one continuous channel.

Assignees

• Darcangelo Charles Michael
• Demartino Steven Edward
• Shorey Aric Bruce
• Strong Daniel Duane
• Tammaro David Alan
• Vaddi Butchi Reddy
• Corning Inc

Inventors

• Darcangelo Charles Michael
• Demartino Steven Edward
• Shorey Aric Bruce
• Strong Daniel Duane
• Tammaro David Alan
• Vaddi Butchi Reddy

Classifications

• B24B1/005 Primary

  using a magnetic polishing agent · CPC title

• B24B31/112 Primary

  using magnetically consolidated grinding powder, moved relatively to the workpiece under the influence of pressure · CPC title

• B24B9/065

  of thin, brittle parts, e.g. semiconductors, wafers · CPC title

• B24B37/00

  Lapping machines or devices; Accessories (B24B3/00 takes precedence) · CPC title

• B24B21/002

  for grinding edges or bevels · CPC title