Methods of laser marking semiconductor substrates

US9099481B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9099481-B2
Application numberUS-201414200283-A
CountryUS
Kind codeB2
Filing dateMar 7, 2014
Priority dateMar 15, 2013
Publication dateAug 4, 2015
Grant dateAug 4, 2015

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Abstract

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In one embodiment, methods for making semiconductor devices are disclosed.

First claim

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What is claimed is: 1. A method comprising: providing a semiconductor substrate comprising: a base substrate having a first semiconductor material; a buried structure; and a device layer having a second semiconductor material, wherein the buried structure is disposed between the base substrate and the device layer; and laser marking the semiconductor substrate, wherein the buried structure has a thickness equal to about k×λ laser /(2×n), wherein: λ laser is a waveleng…

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Frequently asked questions

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What does patent US9099481B2 cover?
In one embodiment, methods for making semiconductor devices are disclosed.
Who is the assignee on this patent?
Semiconductor Components Ind
What technology area does this patent fall under?
Primary CPC classification H10W46/00. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Aug 04 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).