Method for manufacturing electronic device
US-2024258152-A1 · Aug 1, 2024 · US
Laser reflectometry for substrate processing
US9064844B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9064844-B2 |
| Application number | US-201213683026-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 21, 2012 |
| Priority date | Dec 7, 2011 |
| Publication date | Jun 23, 2015 |
| Grant date | Jun 23, 2015 |
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Abstract
Official abstract text for this publication.
Embodiments of the present invention relate to methods and apparatus for control of laser devices and safety features related to utilization of laser devices in substrate processing systems. In one embodiment, a system for processing a substrate is provided. The system includes a chamber having a processing volume, a first laser device to emit a beam at a first wavelength into the processing volume, and a second laser device to emit a beam at a second wavelength into the processing volume, wherein the second wavelength is different than the first wavelength, and the second laser device comprises a filter adapted to attenuate one or both of the first wavelength and the second wavelength.
First claim
Opening claim text (preview).
The invention claimed is: 1. A system for processing a substrate, the system comprising: a chamber having a processing volume; a first laser device to emit a beam at a first wavelength into the processing volume; and a second laser device to emit a beam at a second wavelength into the processing volume, wherein the second wavelength is greater than the first wavelength, and the second laser device comprises a filter that is transmissive to the second wavelength and attenuates…
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Electricity · mapped topic
Electricity · mapped topic
- H10P34/42Primary
Electricity · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
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Frequently asked questions
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- What does patent US9064844B2 cover?
- Embodiments of the present invention relate to methods and apparatus for control of laser devices and safety features related to utilization of laser devices in substrate processing systems. In one embodiment, a system for processing a substrate is provided. The system includes a chamber having a processing volume, a first laser device to emit a beam at a first wavelength into the processing vo…
- Who is the assignee on this patent?
- Moffitt Theodore P, Applied Materials Inc
- What technology area does this patent fall under?
- Primary CPC classification H10P34/42. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jun 23 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).