Method for wafer-level surface micromachining to reduce stiction

Patent metadata

Field	Value
Publication number	US-9045328-B2
Application number	US-201113331582-A
Country	US
Kind code	B2
Filing date	Dec 20, 2011
Priority date	Dec 20, 2011
Publication date	Jun 2, 2015
Grant date	Jun 2, 2015

Abstract

An array of microbumps with a layer or coating of non-superhydrophobic material yields a superhydrophobic surface, and may also have a contact angle hysteresis of 15 degrees or less. A surface with such an array may therefore be rendered superhydrophobic even though the surface structure and materials are not, by themselves, superhydrophobic.

First claim

What is claimed is:

1. A method of fabricating a micromachined device having a superhydrophobic surface, the method comprising:
providing a substrate having a first surface;
providing an array of bumps on the first surface;
adding a low surface-free-energy layer to the array, such that the low surface-free-energy layer coats the bumps but does not fill the space between the bumps;
adding a sacrificial layer on the low surface-free-energy layer, the sacrificial layer having an exposed surface;
depositing a mass layer on the exposed surface of the sacrificial layer such that the sacrificial layer is sandwiched between the substrate and an opposing surface of the mass layer; and
removing the sacrificial layer, thereby exposing the coated array,
wherein the bumps of the array protrude from the substrate in the direction of the opposing surface of the mass layer, and wherein the array has a contact angle of at least 140 degrees and a contact angle hysteresis of less than 15 degrees.

2. The method of fabricating a micromachined device having a superhydrophobic surface of claim 1 , wherein the array of bumps comprises a plurality of bumps having a pitch of between 0.5 microns and 30 microns, and each bump having a height of at least 0.2 microns and width of at least 0.5 microns.

3. The method of fabricating a micromachined device having a superhydrophobic surface of claim 1 , wherein adding a low surface-free-energy layer to the array comprises adding a material selected from the group of fluorine, chlorine, methane, a phenyl-based material, and a perflourodecyltrichlorosilane material.

4. The method of fabricating a micromachined device having a superhydrophobic surface of claim 1 , the method further comprising, before depositing a mass layer on the exposed surface of the sacrificial layer:
etching an array of cavities into the exposed surface of the sacrificial layer;
depositing a second layer of low surface-free-energy material to the array of cavities, the low surface-free-energy material lining but not filling the cavities in the array of cavities such that the cavities are lined cavities,
wherein depositing the mass sandwiches the sacrificial layer and the second low surface-free-energy layer between the substrate and an opposing surface of the mass layer, the mass layer occupying the plurality of lined cavities and forming a plurality of bumps, and wherein removing the sacrificial layer exposes an array of bumps coated with the second low surface-free-energy material.

Assignees

• Liu Fang
• Yang Kuang
• Analog Devices Inc

Inventors

• Liu Fang
• Yang Kuang

Classifications

• Y10T428/24355

  Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.] · CPC title

• B81B3/001 Primary

  Structures having a reduced contact area, e.g. with bumps or with a textured surface · CPC title

• B81B3/0005

  Anti-stiction coatings · CPC title

• B81C2201/112

  Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts · CPC title

• B81B3/0018

  Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators · CPC title