Multi charged particle beam writing apparatus
US-2024242922-A1 · Jul 18, 2024 · US
Blanking apparatus, drawing apparatus, and method of manufacturing article
US9040935B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9040935-B2 |
| Application number | US-201414312953-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 24, 2014 |
| Priority date | Jun 26, 2013 |
| Publication date | May 26, 2015 |
| Grant date | May 26, 2015 |
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Abstract
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The present invention provides a blanking apparatus comprising a plurality of blankers configured to respectively blank a plurality of beams with respect to a target position on an object, and a driving device configured to drive the plurality of blankers, wherein the driving device includes a change device configured to change relation between a combination of beams of the plurality of beams, and a target dose.
First claim
Opening claim text (preview).
What is claimed is: 1. A blanking apparatus comprising: a plurality of blankers configured to respectively and selectively blank a plurality of beams with respect to a target position on an object; and a driving device configured to drive the plurality of blankers, wherein the driving device includes a change device configured to change a relation between a combination of beams, not to be blanked with respect to the target position, of the plurality of beams, and a target dose…
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Classifications
- H01J37/045Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9040935B2 cover?
- The present invention provides a blanking apparatus comprising a plurality of blankers configured to respectively blank a plurality of beams with respect to a target position on an object, and a driving device configured to drive the plurality of blankers, wherein the driving device includes a change device configured to change relation between a combination of beams of the plurality of beams, …
- Who is the assignee on this patent?
- Canon Kk
- What technology area does this patent fall under?
- Primary CPC classification H01J37/045. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue May 26 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).