Scanning method
US-2016313263-A1 · Oct 27, 2016 · US
Beam sensing
US9040930B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9040930-B2 |
| Application number | US-200913003072-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 18, 2009 |
| Priority date | Jul 9, 2008 |
| Publication date | May 26, 2015 |
| Grant date | May 26, 2015 |
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Abstract
Official abstract text for this publication.
A particle beam sensor comprising: scattering means providing a surface for intercepting obliquely a path of a particle beam thereby to permit a scattering of particles from the particle beam by the scattering means; sensor means responsive to receipt of one or more said scattered particles to generate a sensor signal; aperture mask means arranged between the scattering means and the sensor means to present to the scattering means a screen opaque to said scattered particles and having at least one aperture through which an unobstructed view of the scattering means is provided to the sensor means, the aperture (s) thereby permitting selection of all of those particles scattered by the scattering means which may be used to form at the sensor means an image representative of at least a part of a foot print cast by the particle beam upon the scattering means. By scattering particles from a sectional area of a particle beam, scattered beam particles can be used more efficiently compared to existing techniques.
First claim
Opening claim text (preview).
The invention claimed is: 1. A particle beam sensor comprising: a scattering surface configured to intercept obliquely a path of an incident particle beam thereby to permit scattering of some particles from the incident particle beam by the scattering surface, a sensor responsive to receipt of one or more scattered particles to generate a sensor signal; and an aperture mask arranged between the scattering surface and the sensor and presenting to the scattering surface a screen…
Assignees
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Classifications
- G01T1/2914Primary
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
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Frequently asked questions
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- What does patent US9040930B2 cover?
- A particle beam sensor comprising: scattering means providing a surface for intercepting obliquely a path of a particle beam thereby to permit a scattering of particles from the particle beam by the scattering means; sensor means responsive to receipt of one or more said scattered particles to generate a sensor signal; aperture mask means arranged between the scattering means and the sensor mea…
- Who is the assignee on this patent?
- Kyele Nicholas Roberts, Van Silfhout Roelof Gozewijn, Univ Manchester
- What technology area does this patent fall under?
- Primary CPC classification G01T1/2914. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue May 26 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).