Electronic device and manufacturing method thereof
US-2024404831-A1 · Dec 5, 2024 · US
US9033764B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9033764-B2 |
| Application number | US-201113225961-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 6, 2011 |
| Priority date | Sep 9, 2010 |
| Publication date | May 19, 2015 |
| Grant date | May 19, 2015 |
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Official abstract text for this publication.
The present invention provides: a method of polishing an object to be polished for processing a surface of the object to be polished into a concave or convex state with a high degree of accuracy; and a polishing pad. An object to be polished is placed on a polishing pad over the boundary between the first polishing region and the second polishing region, the first polishing region has grooves and the second polishing region has grooves different from those of the first polishing region, and either one of the two regions being formed on a region on the center side, and the other on the outer side in a radial direction on the surface of the polishing pad; and the object to be polished is polished by rotating the polishing pad and the object to be polished.
Opening claim text (preview).
What is claimed is: 1. A method of polishing an object to be polished, wherein a surface of the object to be polished is processed into a concave or convex state by: placing the object to be polished on a polishing pad over a boundary between a first polishing region and a second polishing region, the polishing pad having a first polishing region where grooves are formed and a second polishing region where grooves are formed in a different state from that of the first polishing re…
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