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Substrate inspection apparatus and method for operating the same
US9025852B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9025852-B2 |
| Application number | US-201213482270-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 29, 2012 |
| Priority date | May 30, 2011 |
| Publication date | May 5, 2015 |
| Grant date | May 5, 2015 |
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Abstract
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In one embodiment, a substrate inspection apparatus performs, in its maintenance mode, operations including: guiding a light emitted from an illuminating unit to an imaging device via a light-guiding member disposed in a casing; judging whether or not a level of a brightness signal obtained by the imaging device falls within a predetermined allowable range when a light emitted from the illuminating unit falls on the imaging device via the light-guiding member; and alarming, if it is judged that the value of the brightness signal is out of the predetermined allowable range, that replacement of the illuminating unit is required.
First claim
Opening claim text (preview).
The invention claimed is: 1. A substrate inspection apparatus comprising: a casing; a table disposed in the casing for placement of a substrate thereon; an illuminating unit provided to illuminate the substrate, placed on the table, with a light; an imaging unit having an imaging device provided to image the substrate placed on the table illuminated with the light; a mode selection unit configured to select one of an inspection mode in which an inspection of a substrate pl…
Assignees
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- G01N21/956Primary
Physics · mapped topic
Physics · mapped topic
- G01N21/8806Primary
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
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Frequently asked questions
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- What does patent US9025852B2 cover?
- In one embodiment, a substrate inspection apparatus performs, in its maintenance mode, operations including: guiding a light emitted from an illuminating unit to an imaging device via a light-guiding member disposed in a casing; judging whether or not a level of a brightness signal obtained by the imaging device falls within a predetermined allowable range when a light emitted from the illumina…
- Who is the assignee on this patent?
- Hisano Kazuya, Tomita Hiroshi, Koga Norihisa, and 3 more
- What technology area does this patent fall under?
- Primary CPC classification G01N21/956. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue May 05 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).