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Site-isolated rapid thermal processing methods and apparatus
US9023739B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9023739-B2 |
| Application number | US-201213722624-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 20, 2012 |
| Priority date | Dec 20, 2012 |
| Publication date | May 5, 2015 |
| Grant date | May 5, 2015 |
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Abstract
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Methods and apparatus are described that allow the investigation of process variables used in RTP systems to be varied in a combinatorial manner across a plurality of site-isolated regions designated in the surface of a substrate. The methods and apparatus allow process variables such as power, dwell time, light source, cooling gas composition, cooling gas flow rate, reactive gas composition, reactive gas flow rate, and substrate support temperature and the like to be investigated.
First claim
Opening claim text (preview).
What is claimed is: 1. A method for processing a site isolated region, the method comprising providing a substrate; contacting the substrate with a shield, wherein the shield comprises an opening, wherein the shield comprises an inlet and an outlet for a circulated coolant to regulate the temperature of the shield; processing a region in the opening of the shield using a RTP process. 2. The method of claim 1 further comprising circulating a gaseous or li…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H05B1/0233Primary
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US9023739B2 cover?
- Methods and apparatus are described that allow the investigation of process variables used in RTP systems to be varied in a combinatorial manner across a plurality of site-isolated regions designated in the surface of a substrate. The methods and apparatus allow process variables such as power, dwell time, light source, cooling gas composition, cooling gas flow rate, reactive gas composition, r…
- Who is the assignee on this patent?
- Intermolecular Inc
- What technology area does this patent fall under?
- Primary CPC classification H05B1/0233. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue May 05 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).