Multicathode deposition system and methods
US-12051576-B2 · Jul 30, 2024 · US
System and method for transport
US9017480B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9017480-B2 |
| Application number | US-69266707-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 28, 2007 |
| Priority date | Apr 6, 2006 |
| Publication date | Apr 28, 2015 |
| Grant date | Apr 28, 2015 |
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- Title
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Abstract
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A deposition system and method includes a deposition source, a roll conveyor and at least one shield positioned at a location proximate to the deposition source.
First claim
Opening claim text (preview).
What is claimed is: 1. A deposition system comprising: a housing that defines an enclosed deposition chamber; a roll conveyor located within the deposition chamber to convey a substrate along a direction of conveyance, the roll conveyor comprising a plurality of rollers having an elongated length perpendicular to the direction of conveyance for supporting the substrate and a plurality of roller shafts having an elongated length perpendicular to the direction of conveyance for su…
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Classifications
Electricity · mapped topic
Electricity · mapped topic
- C23C16/4585Primary
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
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Frequently asked questions
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- What does patent US9017480B2 cover?
- A deposition system and method includes a deposition source, a roll conveyor and at least one shield positioned at a location proximate to the deposition source.
- Who is the assignee on this patent?
- Powell Ricky C, First Solar Inc
- What technology area does this patent fall under?
- Primary CPC classification C23C16/4585. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Apr 28 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).