Modulating germanium percentage in MOS devices

US9012964B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9012964-B2
Application numberUS-201313963855-A
CountryUS
Kind codeB2
Filing dateAug 9, 2013
Priority dateAug 9, 2013
Publication dateApr 21, 2015
Grant dateApr 21, 2015

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Abstract

Official abstract text for this publication.

An integrated circuit structure includes a gate stack over a semiconductor substrate, and an opening extending into the semiconductor substrate, wherein the opening is adjacent to the gate stack. A first silicon germanium region is disposed in the opening, wherein the first silicon germanium region has a first germanium percentage. A second silicon germanium region is overlying the first silicon germanium region, wherein the second silicon germanium region has a second germanium percentage higher than the first germanium percentage. A metal silicide region is over and in contact with the second silicon germanium region.

First claim

Opening claim text (preview).

What is claimed is: 1. An integrated circuit structure comprising: a semiconductor substrate; a gate stack over the semiconductor substrate; an opening extending into the semiconductor substrate, wherein the opening is adjacent to the gate stack; a first silicon germanium region in the opening, wherein the first silicon germanium region has a first germanium percentage; a second silicon germanium region over the first silicon germanium region, wherein the second silicon ge…

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What does patent US9012964B2 cover?
An integrated circuit structure includes a gate stack over a semiconductor substrate, and an opening extending into the semiconductor substrate, wherein the opening is adjacent to the gate stack. A first silicon germanium region is disposed in the opening, wherein the first silicon germanium region has a first germanium percentage. A second silicon germanium region is overlying the first silico…
Who is the assignee on this patent?
Taiwan Semiconductor Mfg
What technology area does this patent fall under?
Primary CPC classification H10D30/721. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Apr 21 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).