Transparent conductive film and production method therefor
US-2015357077-A1 · Dec 10, 2015 · US
US9011985B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9011985-B2 |
| Application number | US-201013503806-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 26, 2010 |
| Priority date | Oct 30, 2009 |
| Publication date | Apr 21, 2015 |
| Grant date | Apr 21, 2015 |
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A process for producing a multilayer film which, even when bent, is less apt to decrease in barrier property or electrical conductivity. The process comprises forming a barrier film and a transparent conductive film on a resin film to produce a multilayer film. The barrier film is formed by a plasma enhanced CVD method which uses electric discharge between rolls. The transparent conductive film is preferably formed by physical vapor deposition. The resin film preferably is a polyester resin film or a polyolefin resin film.
Opening claim text (preview).
The invention claimed is: 1. A method comprising: manufacturing a multilayer film by forming a barrier film containing silicon, oxygen, and carbon and a transparent conductive film on a resin film, wherein said barrier film is formed by a plasma enhanced CVD method which uses electric discharge between two rolls in which two magnets are provided respectively under a pressure of 0.1 Pa to 10 Pa in a condition where an intermediate frequency is applied between the rolls where a magn…
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