Method of manufacture of multilayer film

US9011985B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9011985-B2
Application numberUS-201013503806-A
CountryUS
Kind codeB2
Filing dateOct 26, 2010
Priority dateOct 30, 2009
Publication dateApr 21, 2015
Grant dateApr 21, 2015

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Abstract

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A process for producing a multilayer film which, even when bent, is less apt to decrease in barrier property or electrical conductivity. The process comprises forming a barrier film and a transparent conductive film on a resin film to produce a multilayer film. The barrier film is formed by a plasma enhanced CVD method which uses electric discharge between rolls. The transparent conductive film is preferably formed by physical vapor deposition. The resin film preferably is a polyester resin film or a polyolefin resin film.

First claim

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The invention claimed is: 1. A method comprising: manufacturing a multilayer film by forming a barrier film containing silicon, oxygen, and carbon and a transparent conductive film on a resin film, wherein said barrier film is formed by a plasma enhanced CVD method which uses electric discharge between two rolls in which two magnets are provided respectively under a pressure of 0.1 Pa to 10 Pa in a condition where an intermediate frequency is applied between the rolls where a magn…

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What does patent US9011985B2 cover?
A process for producing a multilayer film which, even when bent, is less apt to decrease in barrier property or electrical conductivity. The process comprises forming a barrier film and a transparent conductive film on a resin film to produce a multilayer film. The barrier film is formed by a plasma enhanced CVD method which uses electric discharge between rolls. The transparent conductive film…
Who is the assignee on this patent?
Hasegawa Akira, Kuroda Toshiya, Sanada Takashi, and 1 more
What technology area does this patent fall under?
Primary CPC classification C23C14/086. Mapped technology areas include Chemistry & Metallurgy.
When was this patent published?
Publication date Tue Apr 21 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).