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Vacuum processing apparatus and operating method of vacuum processing apparatus
US9011065B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9011065-B2 |
| Application number | US-87133310-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 30, 2010 |
| Priority date | Nov 12, 2009 |
| Publication date | Apr 21, 2015 |
| Grant date | Apr 21, 2015 |
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- Title
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Abstract
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A vacuum processing apparatus which includes an atmospheric transfer chamber having a plurality of cassette stands for transferring a wafer, a lock chamber for storing the wafer, a first vacuum transfer chamber to which the wafer from the lock chamber is transferred, a transfer intermediate chamber connected to the first vacuum transfer chamber, and a second vacuum transfer chamber connected to the transfer intermediate chamber. At least one vacuum processing chamber is connected to the first vacuum transfer chamber, and two or more vacuum processing chambers are connected to a rear side of the second vacuum transfer chamber. A plurality of gate valves are disposed between the first vacuum transfer chamber and each of the lock chamber, the transfer intermediate chamber, and the vacuum processing chamber coupled to the first vacuum transfer chamber. A control unit is also provided for controlling operation of the gate valves.
First claim
Opening claim text (preview).
What is claimed is: 1. A vacuum processing apparatus which processes a semiconductor wafer, comprising: an atmospheric transfer chamber having a plurality of cassette stands arranged on a front side thereof for transferring the wafer inside thereof, the wafer being stored in a cassette disposed on one of the plurality of cassette stands; a lock chamber arranged on a rear side of the atmospheric transfer chamber, for storing in an interior thereof the wafer transferred from the a…
Assignees
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Classifications
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H10P72/0461Primary
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9011065B2 cover?
- A vacuum processing apparatus which includes an atmospheric transfer chamber having a plurality of cassette stands for transferring a wafer, a lock chamber for storing the wafer, a first vacuum transfer chamber to which the wafer from the lock chamber is transferred, a transfer intermediate chamber connected to the first vacuum transfer chamber, and a second vacuum transfer chamber connected to…
- Who is the assignee on this patent?
- Tauchi Susumu, Kondo Hideaki, Nakata Teruo, and 4 more
- What technology area does this patent fall under?
- Primary CPC classification H10P72/0461. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Apr 21 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).