Resistance variable memory cell structures and methods
US-9184377-B2 · Nov 10, 2015 · US
US8999733B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8999733-B2 |
| Application number | US-201414525228-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 28, 2014 |
| Priority date | Jul 2, 2010 |
| Publication date | Apr 7, 2015 |
| Grant date | Apr 7, 2015 |
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An RRAM includes a resistive layer including a dielectric layer and surplus oxygen ions or nitrogen ions from a treatment on the dielectric layer after the dielectric layer is formed. When the RRAM is applied with a voltage, the oxygen ions or nitrogen ions occupy vacancies in the dielectric layer to increase resistance of the resistive layer. When the RRAM is applied with another voltage, the oxygen ions or nitrogen ions are removed from the vacancies to lower the resistance of the resistive layer.
Opening claim text (preview).
What is claimed is: 1. A method of forming a resistive random-access memory (RRAM) structure, comprising: forming a bottom electrode; forming a dielectric barrier layer on the bottom electrode; forming a dielectric middle layer on the dielectric barrier layer; forming a dielectric screen layer on the dielectric middle layer, wherein the dielectric barrier layer, the dielectric middle layer, and the dielectric screen layer are successively formed on the bottom electrode to th…
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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