Controlled pulse generation methods and apparatuses for evaluating stiction in microelectromechanical systems devices
US-2017370799-A1 · Dec 28, 2017 · US
US8999225B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8999225-B2 |
| Application number | US-201013508217-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 9, 2010 |
| Priority date | Nov 11, 2009 |
| Publication date | Apr 7, 2015 |
| Grant date | Apr 7, 2015 |
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First, an ionic liquid is placed on a glass slide, which is then installed in an evaporation apparatus, and a metal (for example, indium) is mounted as a target material at a position facing the ionic liquid, followed by sputter deposition of the metal. After sputtering, the ionic liquid containing nanoparticles dispersed therein is recovered. The nanoparticles are solid nanoparticles. Next, the ionic liquid containing the solid nanoparticles dispersed therein is placed in a test tube and then oxidized by heating in air at 250° C. for 1 hour. As a result, hollow nanoparticles having cavities formed in core portions of the solid nanoparticles are produced.
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The invention claimed is: 1. A method for producing hollow nanoparticles comprising: (a) depositing a first metal and a second metal which is less oxidizable than the first metal onto or into an ionic liquid, thereby forming solid nanoparticles of an alloy composed of the first and second metals dispersed in the ionic liquid; and (b) oxidizing the solid nanoparticles dispersed in the ionic liquid in a gas atmosphere containing oxidizing gas to produce hollow nanoparticles having…
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
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