Systems and methods to determine stiction failures in MEMS devices
US-2015096377-A1 · Apr 9, 2015 · US
MEMS Device Mechanical Amplitude Control
US2016349056A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016349056-A1 |
| Application number | US-201514723676-A |
| Country | US |
| Kind code | A1 |
| Filing date | May 28, 2015 |
| Priority date | May 28, 2015 |
| Publication date | Dec 1, 2016 |
| Grant date | — |
How to read this patent
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
- Title
What the patent document calls the invention.
- Abstract
A short plain-language summary of the technical disclosure.
- Assignees and inventors
Who owns or filed the patent and who is credited as inventor.
- Key dates
Filing, priority, publication, and grant dates set the timeline.
- First independent claim
The legal scope of protection — read this for what is actually claimed.
- CPC / IPC classifications
Technology tags used to group this patent with similar filings.
- Citations and related patents
Prior art links and similar publications in this corpus.
Abstract
Official abstract text for this publication.
A system and/or method for utilizing mechanical motion limiters to control proof mass amplitude in MEMS devices (e.g., MEMS devices having resonant MEMS structures, for example various implementations of gyroscopes, magnetometers, accelerometers, etc.). As a non-limiting example, amplitude control for a MEMS gyroscope proof mass may be accomplished during normal (e.g., steady state) gyroscope operation utilizing impact stops (e.g., bump stops) of various designs. As another non-limiting example, amplitude control for a MEMS gyroscope proof mass may be accomplished utilizing non-impact limiters (e.g., springs) of various designs, for example springs exhibiting non-linear stiffness characteristics through at least a portion of their normal range of operation.
First claim
Opening claim text (preview).
What is claimed is: 1 . A MEMS sensor comprising: a stationary component; a proof mass that is moveable relative to the stationary component; a mechanical motion limiter that limits oscillation amplitude of the proof mass; and a drive circuit that operates to oscillate the proof mass, wherein during steady state operation of the MEMS sensor, the mechanical motion limiter operates on the proof mass. 2 . The MEMS sensor of claim 1 , wherein the MEM…
Assignees
Inventors
Classifications
- G01C19/5755Primary
Physics · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Patent family
Related publications grouped by family.
External sources
Next steps
Free tools are coming soon. Tell us what you want to track and we'll notify you.
Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US2016349056A1 cover?
- A system and/or method for utilizing mechanical motion limiters to control proof mass amplitude in MEMS devices (e.g., MEMS devices having resonant MEMS structures, for example various implementations of gyroscopes, magnetometers, accelerometers, etc.). As a non-limiting example, amplitude control for a MEMS gyroscope proof mass may be accomplished during normal (e.g., steady state) gyroscope o…
- Who is the assignee on this patent?
- Invensense Inc
- What technology area does this patent fall under?
- Primary CPC classification G01C19/5755. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Thu Dec 01 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).