Multiple Surface LED Light
US-2015345775-A1 · Dec 3, 2015 · US
Vapor delivery device, methods of manufacture and methods of use thereof
US8997775B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8997775-B2 |
| Application number | US-201113114794-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 24, 2011 |
| Priority date | May 24, 2011 |
| Publication date | Apr 7, 2015 |
| Grant date | Apr 7, 2015 |
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- Title
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- Abstract
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Abstract
Official abstract text for this publication.
A method comprises transporting a first stream of a carrier gas to a delivery device that contains a solid precursor compound. The first stream of carrier gas is at a temperature greater than or equal to 20° C. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream and the second stream are combined to form a third stream, such that the dewpoint of the vapor of the solid precursor compound in the third stream is lower than the ambient temperature. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.
First claim
Opening claim text (preview).
What is claimed is: 1. A delivery system comprising: a first stream comprising: a delivery device having an inlet port and an outlet port; the delivery device containing a solid precursor; a first proportional valve; the first proportional valve being in communication with the inlet port of the delivery device; wherein the first proportional valve is operative to control a flow of a first stream of carrier gas to the delivery device based on an applied voltage; a second stre…
Assignees
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Classifications
Chemistry & Metallurgy · mapped topic
- C23C16/4481Primary
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
- C23C16/52Primary
Chemistry & Metallurgy · mapped topic
Physics · mapped topic
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Frequently asked questions
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- What does patent US8997775B2 cover?
- A method comprises transporting a first stream of a carrier gas to a delivery device that contains a solid precursor compound. The first stream of carrier gas is at a temperature greater than or equal to 20° C. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream and the second stream are combined to form a t…
- Who is the assignee on this patent?
- Woelk Egbert, Dicarlo Jr Ronald L, Rohm & Haas Elect Mat
- What technology area does this patent fall under?
- Primary CPC classification C23C16/4481. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Apr 07 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).