Extreme ultraviolet light generation apparatus
US-2016370706-A1 · Dec 22, 2016 · US
Target supply device and extreme ultraviolet light generation apparatus
US8993987B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8993987-B2 |
| Application number | US-201314012642-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 28, 2013 |
| Priority date | Aug 30, 2012 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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- Title
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Abstract
Official abstract text for this publication.
A target supply device may include a receptacle for holding a liquid target material, a first electrode disposed within the receptacle, a nozzle portion provided in the receptacle, a second electrode provided with a first path and disposed facing the nozzle portion, a third electrode provided with a second path that, along with the first path, defines a trajectory of the liquid target material released from the nozzle portion, a first power source that applies a first potential that is higher than a common potential to the first electrode, a second power source that applies a second potential that is lower than the common potential to the third electrode, and a third power source that applies a third potential that is no greater than the first potential and is no less than the second potential to the second electrode.
First claim
Opening claim text (preview).
What is claimed is: 1. A target supply device comprising: a receptacle configured to hold a liquid target material inside the receptacle; a first electrode disposed within the receptacle; a nozzle portion provided in the receptacle; a second electrode provided with a first path and disposed facing the nozzle portion; a third electrode provided with a second path that, along with the first path, defines a trajectory of the liquid target material released from the nozzle por…
Assignees
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Classifications
- H05G2/0023Primary
Electricity · mapped topic
Electricity · mapped topic
- H05G2/006Primary
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US8993987B2 cover?
- A target supply device may include a receptacle for holding a liquid target material, a first electrode disposed within the receptacle, a nozzle portion provided in the receptacle, a second electrode provided with a first path and disposed facing the nozzle portion, a third electrode provided with a second path that, along with the first path, defines a trajectory of the liquid target material …
- Who is the assignee on this patent?
- Gigaphoton Inc
- What technology area does this patent fall under?
- Primary CPC classification H05G2/0023. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).