Electrostatic chuck heater and film deposition apparatus
US-2024203779-A1 · Jun 20, 2024 · US
Resistance heater
US8993939B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8993939-B2 |
| Application number | US-201213424947-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 20, 2012 |
| Priority date | Jan 18, 2008 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
How to read this patent
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
- Title
What the patent document calls the invention.
- Abstract
A short plain-language summary of the technical disclosure.
- Assignees and inventors
Who owns or filed the patent and who is credited as inventor.
- Key dates
Filing, priority, publication, and grant dates set the timeline.
- First independent claim
The legal scope of protection — read this for what is actually claimed.
- CPC / IPC classifications
Technology tags used to group this patent with similar filings.
- Citations and related patents
Prior art links and similar publications in this corpus.
Abstract
Official abstract text for this publication.
A resistance heater is shown and described. The resistance heater may include a body. The body may include at least one heating surface, the heating surface being generally smooth and generally flat and a recess formed in the body, at least a portion of the body having a cross-sectional shape selected from the group consisting of: generally U shape, generally I-shape, and generally H-shape, and where the cross-sectional shape extends along at least a portion of the body.
First claim
Opening claim text (preview).
What is claimed is: 1. A resistance heater comprising: a body comprising: at least one heating surface defined by the body, the heating surface being generally smooth and generally flat; a recess formed in at least a portion of the body, wherein the portion has a cross-sectional shape selected from the group consisting of: generally U shape, generally I-shape, and generally H-shape; and wherein the cross-sectional shape extends along at least a portion of the length of the bo…
Assignees
Inventors
Classifications
Electricity · mapped topic
- H05B3/143Primary
Electricity · mapped topic
Electricity · mapped topic
Patent family
Related publications grouped by family.
External sources
Next steps
Free tools are coming soon. Tell us what you want to track and we'll notify you.
Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US8993939B2 cover?
- A resistance heater is shown and described. The resistance heater may include a body. The body may include at least one heating surface, the heating surface being generally smooth and generally flat and a recess formed in the body, at least a portion of the body having a cross-sectional shape selected from the group consisting of: generally U shape, generally I-shape, and generally H-shape, and…
- Who is the assignee on this patent?
- Morikawa Yuji, Matsui Yoshihiko, Otaka Akinobu, and 4 more
- What technology area does this patent fall under?
- Primary CPC classification H05B3/143. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).