Sensor and electronic device
US-2024310404-A1 · Sep 19, 2024 · US
US8991253B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8991253-B2 |
| Application number | US-201113241333-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 23, 2011 |
| Priority date | Sep 28, 2010 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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Official abstract text for this publication.
In various embodiments, a microelectromechanical system may include a chip, a substrate, a signal generator, and a fixing structure configured to fix the chip to the substrate. The chip may be fixed in such a way that, upon an acceleration of the microelectromechanical system, the chip is moved relative to the substrate. Furthermore, a signal may be generated by the movement of the chip by means of the signal generator.
Opening claim text (preview).
What is claimed is: 1. A microelectromechanical system, comprising: a chip; a substrate; a signal generator; and a coupling structure configured to couple the chip to the substrate; wherein the chip is coupled in such a way that, upon an acceleration of the microelectromechanical system, the chip is moved relative to the substrate, and wherein a signal is generated by the relative movement of the chip by means of the signal generator; wherein the chip is embodied as a si…
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
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