Micromechanical sensor with multiple spring bars

US9103850B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9103850-B2
Application numberUS-201013266985-A
CountryUS
Kind codeB2
Filing dateApr 27, 2010
Priority dateApr 28, 2009
Publication dateAug 11, 2015
Grant dateAug 11, 2015

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Abstract

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A micromechanical sensor comprising a substrate ( 5 ) and at least one mass ( 6 ) which is situated on the substrate ( 5 ) and which moves relative to the substrate ( 5 ) is used to detect motions of the sensor based on an acceleration force and/or Coriolis force which occur(s). The mass ( 6 ) and the substrate ( 5 ) and/or two masses which move toward one another are connected by at least one bending spring device ( 1 ) for a relative rotational motion. The bending spring device ( 1 ) has multiple, in particular two, spring bars ( 2 ) extending essentially parallel to one another for improving the linear spring characteristic of the bending spring device during the rotational motion, and at least one meander ( 3 ) on at least one, preferably on all, of the spring bars ( 2 ).

First claim

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What is claimed is: 1. A micromechanical sensor, comprising: a substrate; an anchor coupled to the substrate; a bending spring device responsive to a rotational movement about the anchor, the bending spring device comprising spring bars that extend substantially parallel from the anchor to one or more masses, wherein each spring bar comprises: a first end being coupled to the anchor; and a second end being coupled to the one or more masses; and a meander located between…

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What does patent US9103850B2 cover?
A micromechanical sensor comprising a substrate ( 5 ) and at least one mass ( 6 ) which is situated on the substrate ( 5 ) and which moves relative to the substrate ( 5 ) is used to detect motions of the sensor based on an acceleration force and/or Coriolis force which occur(s). The mass ( 6 ) and the substrate ( 5 ) and/or two masses which move toward one another are connected by at least one …
Who is the assignee on this patent?
Hammer Hanno, Maxim Integrated Products
What technology area does this patent fall under?
Primary CPC classification G01P15/08. Mapped technology areas include Physics.
When was this patent published?
Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).