Sensor and electronic device
US-2024310404-A1 · Sep 19, 2024 · US
US9103850B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9103850-B2 |
| Application number | US-201013266985-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 27, 2010 |
| Priority date | Apr 28, 2009 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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A micromechanical sensor comprising a substrate ( 5 ) and at least one mass ( 6 ) which is situated on the substrate ( 5 ) and which moves relative to the substrate ( 5 ) is used to detect motions of the sensor based on an acceleration force and/or Coriolis force which occur(s). The mass ( 6 ) and the substrate ( 5 ) and/or two masses which move toward one another are connected by at least one bending spring device ( 1 ) for a relative rotational motion. The bending spring device ( 1 ) has multiple, in particular two, spring bars ( 2 ) extending essentially parallel to one another for improving the linear spring characteristic of the bending spring device during the rotational motion, and at least one meander ( 3 ) on at least one, preferably on all, of the spring bars ( 2 ).
Opening claim text (preview).
What is claimed is: 1. A micromechanical sensor, comprising: a substrate; an anchor coupled to the substrate; a bending spring device responsive to a rotational movement about the anchor, the bending spring device comprising spring bars that extend substantially parallel from the anchor to one or more masses, wherein each spring bar comprises: a first end being coupled to the anchor; and a second end being coupled to the one or more masses; and a meander located between…
Physics · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
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