Cooling system for processing chamber
US-2024393018-A1 · Nov 28, 2024 · US
Regenerator, GM refrigerator, and pulse tube refrigerator
US8991196B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8991196-B2 |
| Application number | US-201213603690-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 5, 2012 |
| Priority date | Mar 19, 2010 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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Abstract
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A helium-cooling type regenerator configured to retain cold temperatures of working gas includes a first section through which the working gas flows, a second section configured to accommodate helium gas as a regenerator material, and a regenerator material pipe connected to the second section and to a helium source.
First claim
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What is claimed is: 1. A pulse tube refrigerator, comprising: a compressor configured to feed working gas to a pulse tube via a regenerator tube and to collect the working gas from the pulse tube via the regenerator tube; and a helium-cooling type regenerator configured to retain cold temperatures of the working gas, the helium-cooling type regenerator including a first section through which helium gas serving as the working gas flows; and a second section configured to accom…
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Frequently asked questions
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- What does patent US8991196B2 cover?
- A helium-cooling type regenerator configured to retain cold temperatures of working gas includes a first section through which the working gas flows, a second section configured to accommodate helium gas as a regenerator material, and a regenerator material pipe connected to the second section and to a helium source.
- Who is the assignee on this patent?
- Xu Mingyao, Sumitomo Heavy Industries
- What technology area does this patent fall under?
- Primary CPC classification F25B9/10. Mapped technology areas include Mechanical Engineering.
- When was this patent published?
- Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).