Reduced capacity carrier, transport, load port, buffer system
US-9224628-B2 · Dec 29, 2015 · US
Load port apparatus
US8979463B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8979463-B2 |
| Application number | US-201113228891-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 9, 2011 |
| Priority date | Sep 10, 2010 |
| Publication date | Mar 17, 2015 |
| Grant date | Mar 17, 2015 |
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- Title
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Abstract
Official abstract text for this publication.
To prevent an overload from being imposed on a door drive mechanism when driving a door increased in weight due to upsizing so that reproducibility of a stop position of the door can be ensured, provided is a load port apparatus in which the door drive mechanism for driving the door in a direction perpendicular to an opening-portion forming plane is constituted by: a rotary cylinder capable of pivoting a cam follower from an angle of 0° to an angle of 180°; and a slider including a cam groove capable of housing the cam follower within a plane perpendicular to a rotational axis of the rotary cylinder, the cam groove extending in a vertical direction, and in which the door is supported by the slider.
First claim
Opening claim text (preview).
What is claimed is: 1. A load port apparatus, which is to be mounted to an attached surface of a semiconductor processing apparatus to form an opening portion for insertion and removal of an object-to-be-processed, and which opens and closes a lid of a pod as a sealed container arranged on an outside of the semiconductor processing apparatus with respect to the attached surface so that the object-to-be-processed is insertable into and removable from an inside of the pod through the…
Assignees
Inventors
Classifications
- H10P72/3406Primary
Electricity · mapped topic
Cross-Sectional Technologies · mapped topic
- H01L21/67772Primary
Electricity · mapped topic
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Frequently asked questions
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- What does patent US8979463B2 cover?
- To prevent an overload from being imposed on a door drive mechanism when driving a door increased in weight due to upsizing so that reproducibility of a stop position of the door can be ensured, provided is a load port apparatus in which the door drive mechanism for driving the door in a direction perpendicular to an opening-portion forming plane is constituted by: a rotary cylinder capable of …
- Who is the assignee on this patent?
- Igarashi Hiroshi, Miyajima Toshihiko, Tdk Corp
- What technology area does this patent fall under?
- Primary CPC classification H10P72/3406. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Mar 17 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).