Method for manufacturing a microelectromechanical structure and microelectromechanical structure
US-11975964-B2 · May 7, 2024 · US
Piezoelectric thin film structure and angular velocity detection apparatus
US8978469B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8978469-B2 |
| Application number | US-201213436931-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 31, 2012 |
| Priority date | Apr 1, 2011 |
| Publication date | Mar 17, 2015 |
| Grant date | Mar 17, 2015 |
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Abstract
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A piezoelectric thin film structure includes a substrate, a silicon oxide film disposed on the substrate, a first aluminum oxide film disposed on the silicon oxide film, a lower electrode layer disposed on the first aluminum oxide film, a piezoelectric film layer disposed on the lower electrode layer, and an upper electrode layer disposed on the piezoelectric film layer.
First claim
Opening claim text (preview).
What is claimed is: 1. An angular velocity detection apparatus comprising: a substrate having a cavity; first and second oscillation arms arranged in parallel in the cavity, the first and second oscillation arms oscillating in opposite directions along a driving oscillation direction perpendicular to a thickness direction of the substrate and orthogonal to a long-axis direction along which the first and second oscillation arms are extended; first and second connecting portions…
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Classifications
- G01C19/5769Primary
Physics · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US8978469B2 cover?
- A piezoelectric thin film structure includes a substrate, a silicon oxide film disposed on the substrate, a first aluminum oxide film disposed on the silicon oxide film, a lower electrode layer disposed on the first aluminum oxide film, a piezoelectric film layer disposed on the lower electrode layer, and an upper electrode layer disposed on the piezoelectric film layer.
- Who is the assignee on this patent?
- Takaoka Masaki, Kaminishi Daisuke, Okada Mizuho, and 2 more
- What technology area does this patent fall under?
- Primary CPC classification G01C19/5769. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Mar 17 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).