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Variable-area capacitor structure, comb grid capacitor accelerometer and comb grid capacitor gyroscope
US8971012B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8971012-B2 |
| Application number | US-201013576042-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 23, 2010 |
| Priority date | Apr 20, 2010 |
| Publication date | Mar 3, 2015 |
| Grant date | Mar 3, 2015 |
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Abstract
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The present invention relates to a variable-area capacitor for a micromechanical sensor, a micromechanical comb grid capacitor accelerometer and a micromechanical comb grid capacitor gyroscope. Among them, the variable-area capacitor structure comprises of a movable and a fixed electrodes in each capacitor unit; a front surface of aforesaid movable electrode is parallel to that of aforesaid fixed electrode; the front surface of aforesaid movable electrode is in a rectangular shape, and the front surface of the fixed electrode is in a triangular or sawteeth shape or the front surface of the movable electrode is in a triangular or sawteeth shape, and the front surface of the fixed electrode is in a rectangular form; the triangular front surface is only overlapped with one long side of aforesaid rectangular front surface. Micromechanical sensors with variable-area capacitor structures of the invention can adjust elasticity coefficient as compared with present technology.
First claim
Opening claim text (preview).
The invention claimed is: 1. A variable-area capacitor structure, comprising a movable electrode and a fixed electrode in each capacitor unit, wherein a front surface of the movable electrode is parallel to a front surface of the fixed electrode, characterized in that: the front surface of the movable electrode is in a rectangular shape, and the front surface of the fixed electrode is in a triangular shape or a sawteeth shape; or the front surface of the movable electrode is a tria…
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Physics · mapped topic
- G01C19/5755Primary
Physics · mapped topic
Physics · mapped topic
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Frequently asked questions
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- What does patent US8971012B2 cover?
- The present invention relates to a variable-area capacitor for a micromechanical sensor, a micromechanical comb grid capacitor accelerometer and a micromechanical comb grid capacitor gyroscope. Among them, the variable-area capacitor structure comprises of a movable and a fixed electrodes in each capacitor unit; a front surface of aforesaid movable electrode is parallel to that of aforesaid fix…
- Who is the assignee on this patent?
- Jin Zhonghe, Hu Shichang, Zhang Xia, and 2 more
- What technology area does this patent fall under?
- Primary CPC classification G01C19/5755. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Mar 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).