Display device and manufacturing method of the display device

Patent metadata

Field	Value
Publication number	US-8970940-B2
Application number	US-201213526568-A
Country	US
Kind code	B2
Filing date	Jun 19, 2012
Priority date	Jun 21, 2011
Publication date	Mar 3, 2015
Grant date	Mar 3, 2015

Abstract

The MEMS shutter includes a shutter having an aperture part, a first spring connected to the shutter, a first anchor connected to the first spring, a second spring and a second anchor connected to the second spring, an insulation film on a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a perpendicular direction to a surface of a substrate, and the insulation film is not present on a surface of the plurality of terminals, and a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a parallel direction to a surface of the substrate and on the opposite side of the side facing the substrate.

First claim

What is claimed is:

1. A display device comprising:
a plurality of pixels arranged above a substrate in a matrix and including a switching element and a MEMS shutter driven by the switching element; and
a plurality of terminals arranged above the substrate and connected to an external terminal;
wherein the MEMS shutter includes:
a shutter having an aperture part, a first spring connected to the shutter, a first anchor connected to the first spring, a second spring and a second anchor connected to the second spring, and
an insulation film on at least one surface of each of the shutter, the first spring, the second spring, the first anchor and the second anchor, the at least one surfaces being oriented in a perpendicular direction to a surface of a substrate; and

wherein the insulation film is not present on the plurality of terminals and those surfaces of the shutter, the first spring, the second spring, the first anchor and the second anchor that are oriented in a parallel direction to, and facing away from the surface of the substrate on which the plurality of terminals are formed.

2. The display device according to claim 1 wherein the first spring and the second spring are electrostatically driven by a potential difference between the first anchor and the second anchor.

3. The display device according to claim 2 wherein the potential difference between the first anchor and the second anchor is supplied by the switching element.

4. The display device according to claim 1 further comprising:
a back light;
wherein
the substrate includes an aperture part and light supplied from the backlight is allowed to pass through from an overlapping section of the aperture part of the shutter and the aperture part of the substrate.

5. The display device according to claim 1 further comprising:
a reflection part arranged above the substrate;
wherein
light reflected by the reflection part is allowed to pass through an overlapping section of the aperture part of the shutter and the reflection part.

6. The display device according to claim 1 further comprising:
an insulation film above the switching element.

7. The display device according to claim 1 further comprising:
an insulation film on surfaces of the shutter, first spring and second spring, that are oriented in a parallel direction to the surface of the substrate and are facing the substrate;
wherein the insulation film on the surfaces of the shutter, first spring, and second spring that are oriented in a parallel direction to the surface of the substrate and are facing the substrate is thinner than the insulation film on the surfaces of the shutter, the first spring and the second spring that are oriented in a perpendicular direction to the substrate.

8. The display device according to claim 1 wherein the shutter is formed by stacking layers having materials with different transmittance ratios.

9. The display device according to claim 1 wherein the shutter is formed by stacking layers having materials with different transmittance ratios such that a material having the lowest transmittance is arranged on a surface of the shutter that is in a parallel direction to, and facing away from, the surface of the substrate.

10. A display device comprising:
a plurality of pixels arranged above a substrate in a matrix and including a switching element and a MEMS shutter driven by the switching element; and
a plurality of terminals arranged above the substrate and connected to an external terminal;
wherein the MEMS shutter includes:
a shutter having an aperture part, a first spring connected to the shutter, a first anchor connected to the first spring, a second spring and a second anchor connected to the second spring, and
an insulation film that coats at least one surface of each of the shutter, the first spring, the second spring, the first anchor and the second anchor, the at least one surfaces being oriented in a perpendicular direction to a surface of a substrate, and
wherein the plurality of terminals and those surfaces of the shutter, the first spring, the second spring, the first anchor and the second anchor that are oriented in a parallel direction to, and facing away from the surface of the substrate on which the plurality of terminals are formed are exposed.

11. The display device according to claim 10 further comprising an insulation film above the switching element.

12. The display device according to claim 10 further comprising:
an insulation film on surfaces of the shutter, first spring and second spring, that are oriented in a parallel direction to the surface of the substrate and are facing the substrate;
wherein the insulation film on the surfaces of the shutter, first spring, and second spring that are oriented in a parallel direction to the surface of the substrate and are facing the substrate is thinner than the insulation film on the surfaces of the shutter, the first spring and the second spring that are oriented in a perpendicular direction to the substrate.

13. The display device according to claim 10 wherein the shutter is formed by stacking layers having materials with different transmittance ratios such that a material having the lowest transmittance is arranged on a surface of the shutter that is in a parallel direction to, and facing away from, the surface of the substrate.

14. A display device comprising:
a plurality of pixels arranged above a substrate in a matrix and including a switching element and a light modulating means driven by the switching element; and
a plurality of means for forming electrical connections arranged above the substrate;
wherein the light modulating means includes an insulating means that coats at least one surface of each of the light modulating means oriented in a perpendicular direction to a surface of a substrate, and
wherein the plurality of electrical connection forming means and those surfaces of the light modulating means that are oriented in a parallel direction to, and facing away from the surface of the substrate on which the plurality of electrical connection forming means are formed are exposed.

15. The display device according to claim 14 further comprising:
insulation means on surfaces of the light modulating means that are oriented in a parallel direction to the surface of the substrate and are facing the substrate;
wherein the insulation means on the surfaces of the light modulating means that are oriented in a parallel direction to the surface of the substrate and are facing the substrate is thinner than the insulation film on the surfaces of light modulating means that are oriented in a perpendicular direction to the substrate.

16. The display device according to claim 14 wherein the light modulating means is formed by stacking layers having materials with different transmittance ratios such that a material having the lowest transmittance is arranged on a surface of the light modulating means that is in a parallel direction to, and facing away from, the surface of the substrate.

Assignees

• Kaitoh Takuo
• Kuriyagawa Takeshi
• Sakata Ryou
• Karikome Osamu
• Brosnihan Timothy J
• Pixtronix Inc

Inventors

• Kaitoh Takuo
• Kuriyagawa Takeshi
• Sakata Ryou
• Karikome Osamu
• Brosnihan Timothy J

Classifications

• B81B7/007

  Interconnections between the MEMS and external electrical signals · CPC title

• B81B2201/045

  Optical switches · CPC title

• B81C2201/0132

  Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling · CPC title

• B81C2201/016

  Passivation · CPC title

• G02B26/0841 Primary

  the reflecting element being moved or deformed by electrostatic means · CPC title