Semiconductor structure including optical device and method for manufacturing the same
US-2024230996-A1 · Jul 11, 2024 · US
US8969989B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8969989-B2 |
| Application number | US-201414196409-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 4, 2014 |
| Priority date | Mar 4, 2013 |
| Publication date | Mar 3, 2015 |
| Grant date | Mar 3, 2015 |
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An optical-to-electrical converter unit includes a substrate having front and back surfaces; an original waveguide unit; and an optical-to-electrical converter. The optical-to-electrical converter includes a light-receiving element optically coupled to the optical waveguide unit; a capacitance element including first and second conductive layers and an insulating layer disposed between the first and second conductive layers; an electrode pad electrically connected to the light-receiving element; a back electrode formed on the back surface of the substrate; and a via electrode extending from the front surface to the back surface of the substrate. The optical waveguide unit, the light-receiving element, the capacitance element, and the electrode pad are formed on the front surface. The first conductive layer of the capacitance element is electrically connected to the light-receiving element and the electrode pad. The second conductive layer of the capacitance element is electrically connected to the back electrode through the via electrode.
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What is claimed is: 1. An optical-to-electrical converter unit comprising: a substrate having a front surface and a back surface; an optical waveguide unit; and at least one optical-to-electrical converter, wherein the optical-to-electrical converter includes: a light-receiving element including an optical absorption layer, a first electrode, and a second electrode, the light-receiving element being optically coupled to the optical waveguide unit; a capacitance element in…
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