Method for fabricating a semiconductor device

US8963205B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8963205-B2
Application numberUS-16516408-A
CountryUS
Kind codeB2
Filing dateJun 30, 2008
Priority dateNov 9, 2007
Publication dateFeb 24, 2015
Grant dateFeb 24, 2015

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Abstract

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A transistor of a semiconductor device includes a substrate, a gate over the substrate, a source/drain region formed in the substrate to have a channel region therebetween, and an epitaxial layer formed below the channel region to have a different lattice constant from the substrate. The epitaxial layer having a different lattice constant with a substrate material is formed below the channel region to apply a stress to the channel region. Thus, the mobility of carriers of the transistor increases.

First claim

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What is claimed is: 1. A transistor of a semiconductor device, comprising: a silicon (Si) substrate, the substrate having a lattice constant; an epitaxial substrate formed over and in contact with the Si substrate; a gate formed over the epitaxial substrate; source/drain regions formed in the epitaxial substrate, wherein a channel region is formed in the epitaxial substrate between the source/drain regions; and an epitaxial layer formed in the Si substrate below the channe…

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What does patent US8963205B2 cover?
A transistor of a semiconductor device includes a substrate, a gate over the substrate, a source/drain region formed in the substrate to have a channel region therebetween, and an epitaxial layer formed below the channel region to have a different lattice constant from the substrate. The epitaxial layer having a different lattice constant with a substrate material is formed below the channel re…
Who is the assignee on this patent?
Kim Yong-Soo, Kim Jun-Ki, Jang Se-Aug, and 1 more
What technology area does this patent fall under?
Primary CPC classification H10D30/751. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Feb 24 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).